2021
DOI: 10.1109/jmems.2021.3088640
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Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks

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Cited by 5 publications
(1 citation statement)
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“…In the process of building higher vocational campus culture, we must first pay attention to the construction of campus media [1][2]. Based on the extensive use of the WeChat platform by the students and teachers, the needs of the students and teachers have been deepened through the WeChat platform, and the problems that have arisen can be solved from this perspective, and then these groups can be properly guided to do good deeds and stand A good team, from the accumulation of bits and pieces to the final formation of the correct three views [3][4].…”
Section: Introductionmentioning
confidence: 99%
“…In the process of building higher vocational campus culture, we must first pay attention to the construction of campus media [1][2]. Based on the extensive use of the WeChat platform by the students and teachers, the needs of the students and teachers have been deepened through the WeChat platform, and the problems that have arisen can be solved from this perspective, and then these groups can be properly guided to do good deeds and stand A good team, from the accumulation of bits and pieces to the final formation of the correct three views [3][4].…”
Section: Introductionmentioning
confidence: 99%