In this work, the effect of the dose of implantation of Ga atoms into the silicon surface on the epitaxial growth of GaAs was investigated. We demonstrate that the deposition of GaAs occurs mainly on modified areas. Separate crystallites of GaAs with an irregular shape are formed on modified areas at the lowest dose of Ga implantation equal to 1 pC/μm2, whereas an increase in the dose of Ga implantation leads to the coalescence of GaAs areas. At a maximum dose of 21 pC/μm2, degradation of the morphology and a decrease in the degree of filling of the area are observed, which is also confirmed by an increase in the roughness of the structure.
This paper shows the results of study of the effect of SiO2 buffer layer thickness on the morphological parameters of nanocrystalline LiNbO3 films formed by pulsed laser deposition. It has been established that with increasing in the thickness of SiO2 buffer layer from 10 nm to 50 nm, the roughness of LiNbO3 films decreases from 5.1 nm to 4.4 nm. The minimum value of the grain diameter (118 nm) corresponds to the thickness of the buffer layer equal to 50 nm. The results obtained can be used in the design and manufacture of integrated acousto-optic and piezoelectric devices, as well as sensitive elements of sensors using various effects of surface acoustic waves.
This paper presents the results of experimental studies of the modes of formation of nanosized structures on the surface of a silicon substrate by the method of focused ion beams (FIB). The regularities of the effect of the ion beam current, accelerating voltage, and radiation dose on the surface morphology of nanoscale structures are determined. The modes under which the effects of implantation swelling (structure height up to 3 nm) and etching (structure depth up to 8 nm) manifest themselves are determined. The average roughness of the resulting structures varies from 0.13 to 0.24 nm. The results can be used in the development of technology for manufacturing instrument structures in nanoelectronics and nanophotonics.
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