2012 IEEE/MTT-S International Microwave Symposium Digest 2012
DOI: 10.1109/mwsym.2012.6259424
|View full text |Cite
|
Sign up to set email alerts
|

Silicon interposer with integrated antenna array for millimeter-wave short-range communications

Abstract: International audienceA 60 GHz cavity-backed antenna array integrated on high-resistivity silicon is demonstrated. The antenna design makes use of Through-Silicon-Vias (TSV), silicon micromachining, and wafer-to-wafer bonding to meet the bandwidth and radiation gain requirements for short-range multi-Gbps communications. The fabrication process is presented. Simulated and experimental results show that the antenna element covers easily the 57–66 GHz standard band with good impedance matching and more than 5 dB… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
16
0

Year Published

2013
2013
2021
2021

Publication Types

Select...
3
3

Relationship

0
6

Authors

Journals

citations
Cited by 26 publications
(16 citation statements)
references
References 5 publications
0
16
0
Order By: Relevance
“…The previously reported performances in [11] showed a gain of up to 4-7.9 dBi in the broadside direction for a single antenna element and a reflection coefficient below 214 dB across the 57-66 GHz band. Note that the array could be more compact if it was realized on a single chip with an inter-element spacing of 2.5 mm as in [11]. The array is composed of five individual antenna chips (5 × 15 mm 2 ) assembled side-by-side with a center-to-center distance of 3 mm (0.6 wavelength at 60 GHz).…”
Section: A) Focal Source Arraymentioning
confidence: 78%
See 1 more Smart Citation
“…The previously reported performances in [11] showed a gain of up to 4-7.9 dBi in the broadside direction for a single antenna element and a reflection coefficient below 214 dB across the 57-66 GHz band. Note that the array could be more compact if it was realized on a single chip with an inter-element spacing of 2.5 mm as in [11]. The array is composed of five individual antenna chips (5 × 15 mm 2 ) assembled side-by-side with a center-to-center distance of 3 mm (0.6 wavelength at 60 GHz).…”
Section: A) Focal Source Arraymentioning
confidence: 78%
“…In this work, the design of the transmit-array unit-cell previously presented in [8] has been updated in order to provide a 3-bit phase quantization (as compared to 2 bits in [8]) and the transmit-array was optimized for a focal array composed of five identical integrated antennas previously developed in [11]. The complete simulated and measured performances are presented and compared, showing a very good agreement.…”
Section: Introductionmentioning
confidence: 99%
“…The integrated passive device (IPD) technology based on TSVs provides a promising option to realize a compact mmW and THz system with excellent RF performance improve system reliability and reduce passive assembly complexity. Thin film IPD technology, such as resistors, capacitors, inductors in the common substrate, provides a wide range of passive component values with higher density and lower process tolerance …”
Section: The Mmw Devices Based On Tsv Technologiesmentioning
confidence: 99%
“…Using TSVs, the front-end electronics of the system can be fabricated on low-resistivity CMOS dies and the antenna fabricated on a separate die with higher resistivity such as in [4] and [5]. The die are then stacked, and TSVs are used to create the connection between the antenna die (stacked onto the nonactive side of the CMOS die) and the active side of the CMOS die using a via-last approach.…”
Section: Introductionmentioning
confidence: 99%
“…The die are then stacked, and TSVs are used to create the connection between the antenna die (stacked onto the nonactive side of the CMOS die) and the active side of the CMOS die using a via-last approach. This solution eliminates the high signal loss associated with the low-resistivity silicon allowing antenna gains of up to 5 dBi [5]; however, via creation requires additional processing, such as fabrication of a redistribution layer (RDL) onto the backside of the IC, increasing the back-end-of-line (BEOL) system cost. Additionally, the loss of TSVs has been characterized and found to have values of approaching 3.5 dB at 20 GHz [6] and 4.96 dB at 10 GHz [7] (results consider the whole system consisting of the via, solder-bump, and RDL).…”
Section: Introductionmentioning
confidence: 99%