Abstract:We have coated the silicon field emission tips with diamond-like carbon (DLC). The array of tips was made of n-type silicon using conventional dry etch. Before DLC coating, the tips were bombarded with argon ion to clean the surface. We found that this bombardment improved the aspect ratio of the tips and the DLC adhesion to the silicon tips. The DLC film was coated using radio frequency plasma assisted-CVD using CgHg gas. Initially, the end of the tips was coated with ball-shape DLC. The current-voltage curve… Show more
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