Silicon dioxide sacrificial layer etching in surface micromachining

Bühler, Johannes; Steiner, F.-P.; Baltes, H.

doi:10.1088/0960-1317/7/1/001

Cited by 150 publications

(90 citation statements)

References 67 publications

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“…These dimensions and materials result in spring constants ranging from 0.001 to 0.1 N m -1 . [113,114] However, there have been several recent reports where other non-traditional materials such as metals, polymers, and nanocomposites have been employed to obtain cantilever structures instead of traditional microelectronic materials. For instance, lithographically defined polymer microcantilevers were fabricated from epoxy based photoresist (SU-8) with integrated gold layers serving as the piezoresistors.…”

Section: Fabrication Of Microcantileversmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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Microcantilevers, one of the most common MEMS structures, have been introduced as a novel sensing paradigm nearly a decade ago. Ever since, the technology has emerged to find important applications in chemical, biological and physical sensing areas. Today the technology stands at the verge of providing the next generation of sophisticated sensors (such as artificial nose, artificial tongue) with extremely high sensitivity and miniature size. The article provides an overview of the modes of detection, theory behind the transduction mechanisms, materials employed as active layers, and some of the important applications. Emphasizing the material design aspects, the review underscores the most important findings, current trends, key challenges and future directions of the microcantilever based sensor technology.

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Section: Fabrication Of Microcantileversmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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“…4 Only hydrofluoric acid and some alkaline substances are capable to chemically attack it. 5,6 Thus an OF has the potential to not adversely affect the physiological environment nor be adversely affected by it. 7 Under sterile conditions, OF will minimize contamination and the risk of infection associated to invasive procedures.…”

Section: Introductionmentioning

confidence: 99%

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Roriz

Frazão

Ribeiro³

et al. 2013

J. Biomed. Opt

192

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Abstract. As optical fibers revolutionize the way data is carried in telecommunications, the same is happening in the world of sensing. Fiber-optic sensors (FOS) rely on the principle of changing the properties of light that propagate in the fiber due to the effect of a specific physical or chemical parameter. We demonstrate the potentialities of this sensing concept to assess pressure in biomedical and biomechanical applications. FOSs are introduced after an overview of conventional sensors that are being used in the field. Pointing out their limitations, particularly as minimally invasive sensors, is also the starting point to argue FOSs are an alternative or a substitution technology. Even so, this technology will be more or less effective depending on the efforts to present more affordable turnkey solutions and peer-reviewed papers reporting in vivo experiments and clinical trials. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…In addition to HF etchants, also NH 4 /HF solutions and HNO 3 /HF acids are used to etch SiO 2 . Another technological possibility is to use vapor hydrofluoric acid, which is referred to as dry etching (Bühler et al 1997).…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional simulation of sacrificial etching

2007

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Sacrificial etching is one of the most important process steps in micro-electro-mechanical systems technology, since it enables the generation of free-standing structures. These structures are often the main part of micro-mechanical devices, intended to sense or induce a mechanical movement. The etching process transforms an initial multi-segmented geometry and depends on material properties and several process conditions. One of the crucial issues for etching is the etching selectivity on different materials. The major task for the simulation is to give an answer, how sacrificial layer surfaces regress in time under the influence of process parameters and to which magnitude surrounding material segments are affected by the etching process. For this purpose we have developed a fully three-dimensional topography simulation tool, Etcher-Topo3D, which is capable to deal with realistic process conditions. The main concept is demonstrated in this work. During simulation the topography of the initial multi-segment geometry is changed which is handled by a level-set algorithm. After a simulation is finished, the level-set representation has usually to be converted back to a mesh representation to enable further analysis. To illustrate the main features of our simulation tool several examples of MEMS structures with a sacrificial layer are presented.

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Silicon dioxide sacrificial layer etching in surface micromachining

Cited by 150 publications

References 67 publications

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Three-dimensional simulation of sacrificial etching

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