Silicon carbide coated MEMS strain sensor for harsh environment applications

Azevedo, Robert G.; Zhang, Jingchun; Jones, D.G.; Myers, David R.; Jog, Anand V.; Jamshidi, B.; Wijesundara, Muthu B. J.; Maboudian, Roya; Pisano, Albert P.

doi:10.1109/memsys.2007.4433166

Cited by 28 publications

(25 citation statements)

References 9 publications

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“…Alternatively, amorphous silicon carbide (a-SiC) has emerged as a candidate encapsulation material for next generation brain implants (68)(69)(70)(71). Created through plasma enhanced chemical vapor deposition, a-SiC films exhibit robust long-term stability, high electronic resistivity, and resistance to corrosion (68,72,73). Moreover, a-SiC has an established track record as a biomedical device material, specifically as a coronary stent coating (74).…”

Section: Future Opportunities For Reproducible and Scalable Fabricatimentioning

confidence: 99%

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Thinking Small: Progress on Microscale Neurostimulation Technology

Pancrazio

Deku

Ghazavi

et al. 2017

Neuromodulation: Technology at the Neural Interface

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Objectives Neural stimulation is well-accepted as an effective therapy for a wide range of neurological disorders. While the scale of clinical devices is relatively large, translational and pilot clinical applications are underway for microelectrode-based systems. Microelectrodes have the advantage of stimulating a relatively small tissue volume which may improve selectivity of therapeutic stimuli. Current microelectrode technology is associated with chronic tissue response which limits utility of these devices for neural recording and stimulation. One approach for addressing the tissue response problem may be to reduce physical dimensions of the device. “Thinking small” is a trend for the electronics industry, and for implantable neural interfaces, the result may be a device that can evade the foreign body response. Materials and Methods This review paper surveys our current understanding pertaining to the relationship between implant size and tissue response and the state-of-the-art in ultra-small microelectrodes. A comprehensive literature search was performed using PubMed, Web of Science (Clarivate Analytics), and Google Scholar. Results The literature review shows recent efforts to create microelectrodes that are extremely thin appear to reduce or even eliminate the chronic tissue response. With high charge capacity coatings, ultra-microelectrodes fabricated from emerging polymers and amorphous silicon carbide appear promising for neurostimulation applications. Conclusion We envision the emergence of robust and manufacturable ultra-microelectrodes that leverage advanced materials where the small cross-sectional geometry enables compliance within tissue. Nevertheless, future testing under in vivo conditions is particularly important for assessing the stability of thin film devices under chronic stimulation.

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Section: Future Opportunities For Reproducible and Scalable Fabricatimentioning

confidence: 99%

“…Created through plasma enhanced chemical vapor deposition, a-SiC films exhibit robust long-term stability, high electronic resistivity, and resistance to corrosion (68,72,73). Moreover, a-SiC has an established track record as a biomedical device material, specifically as a coronary stent coating (74).…”

Section: Introductionmentioning

confidence: 99%

Thinking Small: Progress on Microscale Neurostimulation Technology

Pancrazio

Deku

Ghazavi

et al. 2017

Neuromodulation: Technology at the Neural Interface

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“…(Fig.3) The thickness of SiC coating should be increased to decrease the chance of pinholes in the film as well as extend the corrosion resistance lifetime. However, overly-thick films do not provide for adequate wirebond contact resistivity [7]. This compromise needs to be considered when designing the sensor.…”

Section: B Fabrication Processmentioning

confidence: 99%

“…In addition to temperature, wear and corrosion could degrade the integrity of sensors' materials. SiC as a structural material has shown significant resistance against corrosion and oxidation [6], [7]. However Silicon Carbide (SiC) deposition for MEMS applications is expensive.…”

Section: Introductionmentioning

confidence: 99%

“…Material degradation due to corrosion always starts from the outer surface and penetrates deeper into the structure. Therefore, if an LPCVD SiC deposition can form a conformal encapsulation layer around previously released microstructures [7], it will impart the inert characteristics of SiC at the interface of the device material with the surrounding environment.…”

Section: Introductionmentioning

confidence: 99%

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Corrosion Enhanced Capacitive Strain Gauge at 370°C

et al. 2007

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In this paper a silicon carbide passivated capacitive strain sensor is proposed which continuously and accurately measures strain in corrosive ambient and operates up to 370ºC in air. The analytical model of this low-mechanical noise, highresolution and high-gain capacitive SiC coated sensor predicts 45 aF/µε sensitivity, which is in a good agreement with finite element analysis (within 12%) over the intended full-scale range of 1-1000 µε. The gauge is fabricated using silicon-oninsulator and coated with a thin (~ 60nm) pinhole-free 3C-SiC layer. The integrity of the passivation layer is tested using a hot KOH bath followed by SEM inspection which shows no defects or damage. A localized-heating, high-temperature testing setup has been built using an infra-red lamp to heat the gauge up to 370ºC while maintaining the electronics at significantly reduced temperatures. Experimental results show the strain gauge successfully continues to operate at 370ºC.

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Luminescence nanomaterials for biosensing applications

Kumar¹,

Bhatt²,

Saruchi

et al. 2022

Luminescence

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Due to their capacity to immobilize more bioreceptor parts at reduced volumes, nanomaterials have emerged as potential tools for increasing the sensitivity to specific molecules. Furthermore, carbon nanotubes, gold nanoparticles, polymer nanoparticles, semiconductor quantum dots, nanodiamonds, and graphene are among the nanomaterials that are under investigation. Due to the fast development of this field of research, this review summarizes the classification of biosensors using the main receptors and design of biosensors. Numerous studies have concentrated on the manipulation of persistent luminescence nanoparticles (PLNPs) in biosensing, cell tracking, bioimaging, and cancer therapy due to the effective removal of autofluorescence interference from tissues and the ultra‐long near‐infrared afterglow emission. As luminescence has a unique optical property, it can be detected without constant external illumination, preventing autofluorescence and light dispersion through tissues. These successes have sparked an increasing interest in creating novel PLNP types with the desired superior properties and multiple applications. In this review, we emphasize the most recent developments in biosensing, imaging, and image‐guided therapy whilst summarizing the research on synthesis methods, bioapplications, biomembrane modification, and the biosafety of PLNPs. Finally, the remaining issues and difficulties are examined together with prospective future developments in the biomedical application field.

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Silicon carbide coated MEMS strain sensor for harsh environment applications

Cited by 28 publications

References 9 publications

Thinking Small: Progress on Microscale Neurostimulation Technology

Thinking Small: Progress on Microscale Neurostimulation Technology

Corrosion Enhanced Capacitive Strain Gauge at 370°C

Luminescence nanomaterials for biosensing applications

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