Silicon-based tool electrodes for micro electrochemical machining

Liu, Guodong; Yong, Li; Kong, Quancun; Tong, Hao; Zhong, Hao

doi:10.1016/j.precisioneng.2018.02.003

Cited by 24 publications

(11 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The end face of the cantilever beam is connected to the negative pole of micro ECM power supply through the heavily doped silicon substrate and the bonding pad to work as tool electrode to participate in workpiece material removal. The sensors-integrated silicon electrode is installed on the high-speed rotating motor spindle through a special fixture, and the prism electrode rotates around its geometric center to form a cylindrical envelope, achieving the same processing effect as the cylindrical electrode [4]. The clamping part and the working part are connected through a multi-step transition.…”

Section: Structure Designmentioning

confidence: 99%

“…By electrodes rotating [4], electrodes vibrating [5], and hollow electrodes internal forcing flushing [6], electrolyte flow is promoted and so electrolyte is updated faster. By adding acids, complexing agents, and other components into electrolyte to dissolve hydroxides [7], processing products are easier to be excreted and electrolyte performance is improved.…”

Section: Introductionmentioning

confidence: 99%

“…Our laboratory had proposed a sidewall-insulated silicon electrode for micro ECM [4,16]. With bulk silicon process, the silicon electrode has the potential to integrate micro sensors.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Zhu,

Liu,

et al. 2024

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a sensors-integrated silicon electrode, with a micro temperature sensor and a micro conductivity sensor on the silicon electrode near-front sidewall, is proposed innovatively in this study. Based on bulk silicon process and electroplating process, sensors-integrated silicon electrodes are designed and fabricated. Based on the signal processing system built for the temperature and conductivity sensor, the temperature and conductivity detection functions are verified and the sensors are calibrated. Micro ECM experiments with sensors-integrated silicon electrodes are carried out and micro holes with 200 μm depth are machined. For the conductivity sensor on the sensors-integrated silicon electrode, due to the affection of electrolytic environment, the function surface is contaminated and damaged, and the structural design needs to be further improved. For the temperature sensor, it is not affected by the electrolytic environment due to insulation-film’s protection, and reliable temperature monitoring is achieved in micro ECM. The detection results indicate that the temperature inside the machining gap has increased by 20 ℃ due to the electrochemical thermal effect and resistance thermal effect in micro ECM, and the temperature shows an increasing trend while machining depth increasing. The feasibility of process monitoring with sensors-integrated silicon electrode in micro ECM is preliminarily verified.

show abstract

Section: Structure Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Zhu,

Liu,

et al. 2024

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

show abstract

“…The increase in duty cycle induces the electrochemical reaction and generates hydrogen bubbles near to the electrode due to the application of permanent magnets [38]. The higher formation of hydrogen bubbles contributes for the higher bubbles diffusions which attribute the micro moving force which leads to the quick refreshment of electrolyte and fast electrons movement [27]. Thus, PMGT electrode generates 61.76% elevated MR compare to SS tool at parametric level of 55%, 12V, and 28g/l.…”

Section: Effect Of Machining Voltage On Mr and Ocmentioning

confidence: 99%

“…The heated electrode results in 37 % and 88 % improvement in OC and MR respectively. Liu et al [27] have employed the nonconductive material such as SiO2 and Si3N4 insulated tool on tool steel alloy. They noted considerable development in taper angle of hole and OC.…”

Section: Introductionmentioning

confidence: 99%

Enhancing MRR and accuracy with magnetized graphite tool in electrochemical micromachining of copper

Palaniswamy¹,

Seeniappan²,

Thanigaivelan

et al. 2023

CI&CEQ

View full text Add to dashboard Cite

Micro hole is the fundamental feature found in any device/components. Hence this paper aims to produces the micro holes using electrochemical micromachining (EMM). The existing machining techniques in EMM for creating micro holes are associated with more overcut (OC). Hence, it is very essential to reduce OC and enhance the machining rate (MR). This paper aspires to investigate the effect of graphite electrode with magnetic force on copper plate. Four different tools namely electromagnetic graphite tool (EMGT), permanent magnet graphite tool (PMGT), graphite tool and stainless steel (SS) tool are employed for these experiments. The major influencing factors are machining voltage in volts, duty cycle in % and electrolyte concentration in g/l was considered on MR and OC. The results exposed that EMGT, PMGT and graphite electrodes produce MR of 106.4%, 74.6 % and 44.5 % over SS tool at parameter level of 23 g/l, 15 V, and 85% respectively. Graphite and EMGT electrode resulting in 11.9% and 3.41 % reduced OC respectively than SS tool at parameter level of 8V, 95% and 28 g/l. Additionally, scanning electron microscope (SEM) picture examination is conducted to identify the magnetic field effect on the work surface.

show abstract

Performance of Electrochemical Micromachining of Magnesium Alloy Through Sodium Nitrate Electrolyte

Sivashankar¹,

Thanigaivelan²

2022

Lecture Notes in Mechanical Engineering

View full text Add to dashboard Cite

Silicon-based tool electrodes for micro electrochemical machining

Cited by 24 publications

References 11 publications

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Enhancing MRR and accuracy with magnetized graphite tool in electrochemical micromachining of copper

Performance of Electrochemical Micromachining of Magnesium Alloy Through Sodium Nitrate Electrolyte

Contact Info

Product

Resources

About