Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining
Yulan Zhu,
Guodong Liu,
Yong Li
et al.
Abstract:The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a … Show more
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