Silicon based solvent immersion imprint lithography for rapid polystyrene microfluidic chip prototyping

Chen, Jingdong; Wang, Wenjie; Ji, Weibang; Liu, Shao‐Ding; Chen, Qiushu; Wu, Bimin; Coleman, Rhima M.; Fan, Xudong

doi:10.1016/j.snb.2017.03.146

Cited by 7 publications

(2 citation statements)

References 40 publications

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“…In SIIL, the polymer is immersed in common solvents to generate a soft (gel-like) layer at the polymer-solvent interface. This layer can be readily imprinted [22] using PDMS or Si stamps, as well as bonded to a substrate [23][24][25][26]. In the context of DGs, SIIL has been shown to successfully fabricate both 1D and 2D gratings with periods as low as 140 nm [23].…”

Section: Fabrication Methodsmentioning

confidence: 99%

Stimuli responsive diffraction gratings in soft-composite materials

Guglielmelli¹,

Nemati²,

Vasdekis³

et al. 2018

J. Phys. D: Appl. Phys.

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Diffraction gratings (DGs) are unique optical components with the capability to control and address a travelling light wave because of their micro/nanoscale periodicity. Nowadays, DGs are used in several sophisticated and high-tech applications such as spectrometers, memories, as well as in bioengineering and telecommunications. Advanced micro and nano fabrication processes enable the realization of DGs with excellent morphological and optical properties. However, realizing DGs with on-demand optical parameters is still a challenge because of the absence of reliable and cost-effective smart materials. Herein, we discuss the unique and compelling opportunities obtained by bridging materials with intrinsic flexibility (soft polymers) and re-configurability (liquid crystals (LCs)), as well as emerging fabrication procedures. Further, we present several stimuli responsive DGs used in various research fields such as sensing, biotechnology and solar energy. Lastly, in the light of flexible and reconfigurable DGs applications, we report different examples of light responsive and electroactivated, LCs based, DGs.

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Section: Fabrication Methodsmentioning

confidence: 99%

Stimuli responsive diffraction gratings in soft-composite materials

Guglielmelli¹,

Nemati²,

Vasdekis³

et al. 2018

J. Phys. D: Appl. Phys.

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“…In previous studies, the type of polymers commonly used for microfluidic chips are polymethylmethacrylate (PMMA) [14], polydimethylsiloxane (PDMS) [15], polyethylene terephthalate (PETE) [16], polycarbonate (PC) [17], and polystyrene (polystyrene, PS) [18]. In this study, the microfluidic chip is made of polymethylmethacrylate (PMMA); the structure and dimensions of the microchannel chip are shown in Figure 1.…”

Section: Microfabrication Of Microfluidic Chipmentioning

confidence: 99%

Development of an Automated Optical Inspection System for Rapidly and Precisely Measuring Dimensions of Embedded Microchannel Structures in Transparent Bonded Chips

Chen

Lin

Truong

et al. 2021

Sensors

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This study aimed to develop an automated optical inspection (AOI) system that can rapidly and precisely measure the dimensions of microchannels embedded inside a transparent polymeric substrate, and can eventually be used on the production line of a factory. The AOI system is constructed based on Snell’s law. The concept holds that, when light travels through two transparent media (air and the microfluidic chip transparent material), by capturing the parallel refracted light from a light source that went through the microchannel using a camera with a telecentric lens, the image can be analyzed using formulas derived from Snell’s law to measure the dimensions of the microchannel cross-section. Through the NI LabVIEW 2018 SP1 programming interface, we programmed this system to automatically analyze the captured image and acquire all the needed data. The system then processes these data using custom-developed formulas to calculate the height and width measurements of the microchannel cross-sections and presents the results on the human–machine interface (HMI). In this study, a single and straight microchannel with a cross-sectional area of 300 μm × 300 μm and length of 44 mm was micromachined and sealed with another polymeric substrate by a solvent bonding method for experimentations. With this system, 45 cross-sectional areas along the straight microchannel were measured within 20 s, and experiment results showed that the average measured error was less than 2%.

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