Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology

Ziouche, Katir; Yuan, Zheng; Lejeune, Pascale; Lasri, T.; Leclercq, D.; Bougrioua, Z.

doi:10.1109/jmems.2016.2633442

Cited by 44 publications

(20 citation statements)

References 11 publications

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“…It must be noted that the heat transfer issues discussed in this chapter revolve about the challenge of exchanging heat in planar micromachined structures exhibiting very small exchange surfaces [18][19][20][21][22], while the particular nature of the thermoelectric material employed (e.g. NWs) is of no significance: the same conclusions will apply if silicon membranes, silicon-based thin films, or any other thermoelectric films of interest were considered instead.…”

Section: Micro Thermal Device Architecturementioning

confidence: 94%

Managing Heat Transfer Issues in Thermoelectric Microgenerators

Salleras¹,

Fonseca²,

Donmez-Noyan³

et al. 2021

Heat Transfer - Design, Experimentation and Applications

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This chapter deals with heat transfer challenges in the microdomain. It focuses on practical issues regarding this matter when attempting the fabrication of small footprint thermoelectric generators (μTEGs). Thermoelectric devices are designed to bridge a heat source (e.g. hot surface) and a heat sink (e.g. ambient) assuring that a significant fraction of the available temperature difference is captured across the active thermoelectric materials. Coexistence of those contrasted temperatures in small devices is challenging. It requires careful decisions about the geometry and the intrinsic thermal properties of the materials involved. The geometrical challenges lead to micromachined architectures, which silicon technologies provide in a controlled way, but leading to fragile structures, too. In addition, extracting heat from small systems is problematic because of the high thermal resistance associated to heat exchanged by natural convection between the surrounding air and small bare surfaces. Forced convection or the application of a cold finger clearly shows the usefulness of assembling a heat exchanger in a way that is effective and compliant with the mechanical constraints of micromachined devices. Simulations and characterization of fabricated structures illustrate the effectiveness of this element integration and its impact on the trade-off between electrical and thermal behavior of the active materials in device performance.

show abstract

Section: Micro Thermal Device Architecturementioning

confidence: 94%

Managing Heat Transfer Issues in Thermoelectric Microgenerators

Salleras¹,

Fonseca²,

Donmez-Noyan³

et al. 2021

Heat Transfer - Design, Experimentation and Applications

View full text Add to dashboard Cite

show abstract

“…The metal-nanowire electrical contact has been investigated, and very low values of contact resistances have been achieved, by Gaeda and co. [ 60 ]. As alternative, suspended silicon platforms can be used to host

junction made of polysilicon [ 61 , 62 ] or porous silicon [ 63 ].…”

Section: Techniques For All-silicon Thermoelectric Devicesmentioning

confidence: 99%

Silicon Nanowires: A Breakthrough for Thermoelectric Applications

2021

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The potentialities of silicon as a starting material for electronic devices are well known and largely exploited, driving the worldwide spreading of integrated circuits. When nanostructured, silicon is also an excellent material for thermoelectric applications, and hence it could give a significant contribution in the fundamental fields of energy micro-harvesting (scavenging) and macro-harvesting. On the basis of recently published experimental works, we show that the power factor of silicon is very high in a large temperature range (from room temperature up to 900 K). Combining the high power factor with the reduced thermal conductivity of monocrystalline silicon nanowires and nanostructures, we show that the foreseen figure of merit ZT could be very high, reaching values well above 1 at temperatures around 900 K. We report the best parameters to optimize the thermoelectric properties of silicon nanostructures, in terms of doping concentration and nanowire diameter. At the end, we report some technological processes and solutions for the fabrication of macroscopic thermoelectric devices, based on large numbers of silicon nanowire/nanostructures, showing some fabricated demonstrators.

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“…In both cases, microTEGs operate converting relatively large heat fluxes (due to the small thermal areal resistance of micrometric-sized legs) into electric power over small temperature differences, since the proximity of the two heat sinks disables the establishment of temperature differences comparable to those used in standard TEGs. Both layouts have enabled improved performances over the last twenty years, moving from 1.5 μW (parallel layout, over a temperature difference of 10K) [16] and 1.3 μW cm −2 (normal layout, over a temperature difference of 5K) [17] to the recently achieved power density of 12.3 μW cm −2 (normal layout, over a temperature difference of 31K) [18].…”

Section: Integrated Tegsmentioning

confidence: 99%

Thermoelectric harvesters and the internet of things: technological and economic drivers

Narducci

2019

J. Phys. Energy

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The spectacular growth of networks of intercommunicating sensing nodes has generated a request for alternate, renewable power sources. Thermoelectric generators (TEGs), either conventional or integrated, are possible candidates. This paper analyzes the usability of TEGs as alternate power sources for wireless sensor network. It is shown how TEGs meet power requirements of low-power sensing nodes and how they outperform batteries as of the installation costs. Factors still hampering TEG wider use are also reviewed and commented upon, and an outlook at specific applications where TEGs might be rapidly deployed is provided.

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Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology

Cited by 44 publications

References 11 publications

Managing Heat Transfer Issues in Thermoelectric Microgenerators

Managing Heat Transfer Issues in Thermoelectric Microgenerators

Silicon Nanowires: A Breakthrough for Thermoelectric Applications

Thermoelectric harvesters and the internet of things: technological and economic drivers

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