2001
DOI: 10.1063/1.1370540
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Silicoboron–carbonitride ceramics: A class of high-temperature, dopable electronic materials

Abstract: The structure and electronic properties of polymer-derived silicoboron-carbonitride ceramics are reported. Structural analysis using radial-distribution-function formalism showed that the local structure is comprised of Si tetrahedra with B, C, and N at the corners. Boron doping of SiCN leads to enhanced p-type conductivity ͑0.1 ⍀ Ϫ1 cm Ϫ1 at room temperature͒. The conductivity variation with temperature for both SiCN and SiBCN ceramics shows Mott's variable range hopping behavior in these materials, character… Show more

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Cited by 113 publications
(67 citation statements)
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“…Because of the interesting properties of the a-SiC thin film, the economic interest in the production of this material is high. Alternatively, polymeric precursors have been used to synthesize boron nitride, silicon-carbonitride, silicon carbide and silicon nitride [9][10][11]. In a relatively recent development, described in detail elsewhere [12], polysilane precursors have been used in the polymer-source chemical vapor deposition (PS-CVD) method to synthesize thin films of SiC.…”
Section: Introductionmentioning
confidence: 99%
“…Because of the interesting properties of the a-SiC thin film, the economic interest in the production of this material is high. Alternatively, polymeric precursors have been used to synthesize boron nitride, silicon-carbonitride, silicon carbide and silicon nitride [9][10][11]. In a relatively recent development, described in detail elsewhere [12], polysilane precursors have been used in the polymer-source chemical vapor deposition (PS-CVD) method to synthesize thin films of SiC.…”
Section: Introductionmentioning
confidence: 99%
“…Non-oxide silicon boron carbonitride (Si-B-C-N) ceramics can be a potential candidate material for aerospace applications due to its low density of 2.5 g/cm 3 [2]. It has high thermal stability of 2200 1C in inert atmosphere [2] and 1800 1C in air [3], and provides excellent thermomechanical properties [4][5][6][7]. It also possesses high phase stability as it remains amorphous and resists crystallization up to as high as 1800 1C [8,9].…”
Section: Introductionmentioning
confidence: 98%
“…semiconductors with a tunable conductivity [2]). A proper synthesis route of these materials is from organo-elemental polymers, which contain the elements Si, B, C and N. These so called precursors are transformed into amorphous covalent ceramics by solid state thermolysis without sintering additives.…”
Section: Introductionmentioning
confidence: 99%