“…Because of the interesting properties of the a-SiC thin film, the economic interest in the production of this material is high. Alternatively, polymeric precursors have been used to synthesize boron nitride, silicon-carbonitride, silicon carbide and silicon nitride [9][10][11]. In a relatively recent development, described in detail elsewhere [12], polysilane precursors have been used in the polymer-source chemical vapor deposition (PS-CVD) method to synthesize thin films of SiC.…”