1994
DOI: 10.1007/bf02352915
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Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

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Cited by 11 publications
(6 citation statements)
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“…The majority of these studies were focused on the prevention of the hydrolysis. [20][21][22][23] Some researches noticed an incubation time prior to the start of the hydrolysis reactions, [24][25][26] which was attributed to a thin, hydrated aluminum oxide layer on the surface of the AlN particles that, has to be dissolved or penetrated by the water molecules in order that the hydrolysis can begin. The presence of a 5-10-nm thick aluminum oxide layer on the surface of the AlN particles was first confirmed by Slack and McNelly.…”
Section: Introductionmentioning
confidence: 99%
“…The majority of these studies were focused on the prevention of the hydrolysis. [20][21][22][23] Some researches noticed an incubation time prior to the start of the hydrolysis reactions, [24][25][26] which was attributed to a thin, hydrated aluminum oxide layer on the surface of the AlN particles that, has to be dissolved or penetrated by the water molecules in order that the hydrolysis can begin. The presence of a 5-10-nm thick aluminum oxide layer on the surface of the AlN particles was first confirmed by Slack and McNelly.…”
Section: Introductionmentioning
confidence: 99%
“…Alternatively, it was also shown that very thin layer of either silica/SiAlON or alumina/AlON can provide some protection. Silica is deposited via CVD process and subsequent calcination, whereas alumina can be deposited with controlled oxidation of AlN at elevated temperatures in air . Both approaches, however, only slow down the hydrolysis process in water also introducing significant proportion of oxygen.…”
Section: Introductionmentioning
confidence: 99%
“…Many groups have studied surface treatment of powders by low pressure plasma with rotary drum reactors [6][7][8][9]. Significant disadvantages arise with regard to treatment homogeneity, because of the residence time distribution which is similar to a stirred reactor but also, in the case of fine powders (below 100 lm) agglomeration occurs [10].…”
Section: Introductionmentioning
confidence: 99%