Silica-based sol-gel optical waveguides on silicon

Orignac, Xavier; Almeida, Rui M.

doi:10.1049/ip-opt:19960834

Cited by 25 publications

(12 citation statements)

References 10 publications

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“…Dense silica thin films have a variety of applications such as antioxidation and anticorrosion coatings, wear‐ or scratch‐resistant coatings, electrically insulating thin films, and planar optical waveguides . Such silica thin films are prepared by chemical vapor deposition, ion‐beam‐assisted deposition, flame hydrolysis deposition, sol–gel method, liquid‐phase deposition, cathodic electrolysis, and electrophoretic deposition . A solution route utilizing perhydropolysilazane (PHPS), an inorganic polymer composed of Si–N skeletons with Si–H terminal groups, has attracted much attention as a process for silica thin film preparation.…”

Section: Introductionmentioning

confidence: 99%

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

et al. 2013

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Spin‐on perhydropolysilazane (PHPS) thin films were converted into mechanically hard silica thin films by an exposure to the vapor from aqueous ammonia. Infrared absorption and X‐ray photoelectron spectroscopic analyses were conducted to clarify the details of the PHPS‐to‐silica conversion and the nature of the silica thin film products. The PHPS‐to‐silica conversion was found to proceed rapidly between 2 and 3 h of exposure via a reaction‐limited process, where the refractive index and the pencil hardness greatly decreased and increased, respectively. Finally, the O/Si mole ratio close to 2 was achieved, which has never been realized in literature for PHPS‐derived silica thin films. It was also found that the condensation of Si–OH groups proceeds in films immediately after PHPS hydrolysis, which is similar to the base‐catalyzed hydrolysis–condensation reaction of silicon alkoxides. Although the silica thin films obtained had refractive indices similar to that of silica glass, high pencil hardness over 9H on Si(100) substrates, and O/Si mole ratios close to 2, it was concluded that they are nonidentical to silica glass, containing trace amounts of Si–OH and Si–H groups.

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Section: Introductionmentioning

confidence: 99%

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

et al. 2013

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“…9 Sol-gel synthesis can easily modulate the composition of materials with excellent chemical uniformity and desirable optical properties. 10,11 It has been applied to fabricate SiO 2 -TiO 2 films [11][12][13][14][15][16] but for a limited range of SiO 2 :TiO 2 composition. In this study, thin films of SiO 2 -TiO 2 composite oxides with full-range SiO 2 :TiO 2 composition, from 100% SiO 2 to 100% TiO 2 , were prepared by a sol-gel-derived method using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors.…”

Section: Introductionmentioning

confidence: 99%

Compositional Tailored Sol-Gel SiO₂–TiO₂ Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties

Lai

Chen

et al. 2005

J. Mater. Res.

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Thin films of SiO 2 -TiO 2 composite oxides with various SiO 2 :TiO 2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO 2 -TiO 2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectrophotometry. The Si/Ti ratios in the SiO 2 -TiO 2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40%, the SiO 2 -TiO 2 thin films remain amorphous (without formation of TiO 2 crystalline phase) after annealing at temperatures as high as 700°C. FTIR spectra indicate that the quantity of Si-O-Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80%:20%. The refractive index of the SiO 2 -TiO 2 films increases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO 2 -rich films possess higher ultraviolet-visible transmittance than the TiO 2 -rich films. The modification of microstructure and chemical bonding configuration in the SiO 2 -TiO 2 films by the composition and its influence on the optical properties are discussed.

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“…is an matrix representing the discretized first derivative with respect to , namely, (8) and is an tridiagonal matrix, representing the discretized form of the second derivative (9) If we now introduce a new matrix , such that (7) reduces to the second-order equation Solutions for constant then have the form (10) Here and are the eigenvalue and eigenvector matrices of , respectively, so that . Note that (10) contains both forward and backward waves, with amplitudes defined by and .…”

Section: The Methods Of Lines For Active Waveguides In Polar Coormentioning

confidence: 99%

Analysis of folded erbium-doped planar waveguide amplifiers by the method of lines

Huang

Syms

1999

J. Lightwave Technol.

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Silica-based sol-gel optical waveguides on silicon

Cited by 25 publications

References 10 publications

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Compositional Tailored Sol-Gel SiO₂–TiO₂ Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties

Analysis of folded erbium-doped planar waveguide amplifiers by the method of lines

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Silica-based sol-gel optical waveguides on silicon

Cited by 25 publications

References 10 publications

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Compositional Tailored Sol-Gel SiO2–TiO2 Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties

Analysis of folded erbium-doped planar waveguide amplifiers by the method of lines

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Compositional Tailored Sol-Gel SiO₂–TiO₂ Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties