Shock-Resistibility of MEMS-Based Inertial Microswitch under Reverse Directional Ultra-High g Acceleration for IoT Applications

MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

Section: Passive Inertial Switchesmentioning

confidence: 99%

“…The tri-axial MEMS inertial switch with shock-resistibility (Xu 2016[83]): (a) the working principle; (b) the photo; (c) the schematic of the test circuit.…”

mentioning

confidence: 99%

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

“…In 2009, Jui-Chang Kuo et al proposed a passive inertial switch using multiwall carbon nanotube (MWCNT)–hydrogel composite integrated with an inductor/capacitor (L–C), and indicated that the inertial switches can be used for safety and protection in airbags, crash recorders, and arming and firing systems [ 4 ]. In 2017, Xu Q et al reported an Inertial Microswitch under Reverse Directional Ultra-High g Acceleration for IoT Applications [ 5 ].…”

Section: Introductionmentioning

confidence: 99%

The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

Chen

Wang

et al. 2021

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness of rectangular suspension springs is analyzed. The simulation result shows that the coupling stiffness of the rectangular spring suspension system in the non-sensitive direction is a little more than that in the sensitive direction, which indicated that the omnidirectional switching system’s stability is reinforced, attributed to the design of rectangular springs. The dynamic response simulation shows that the threshold of the omnidirectional inertial switch using the rectangular suspension spring has high consistency in the horizontal direction. The prototype of an inertial switch is fabricated and tested successfully. The testing results indicate even threshold distribution in the horizontal direction. The threshold acceleration of the designed inertial switch is about 58 g in the X direction and 37 g in the Z direction; the contact time is about 18 μs.

“…Especially in recent years with the rapid development of the Internet of Things, the MEMS inertial switch has been more widely used. For example, a longitudinally driven inertial switch was proposed for IoT applications by Qiu et al [5]. Ongkodjojo and Tay reported a G-switch comprising an elastic beam for healthcare applications [6].…”

Section: Introductionmentioning

confidence: 99%

The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch

Chen

Wang

et al. 2019

In this work, to evaluate the influence of the threshold on the dynamic contact process, five models (number 1, 2, 3, 4, 5) with different thresholds were proposed and fabricated with surface micromachining technology. The contact time and response time were used to characterize the dynamic contact performance. The dynamic contact processes of the inertial switches with gradually increasing thresholds were researched using analytical, simulation, and experimental methods. The basic working principle analysis of the inertial switch shows that the contact time of the inertial switch with a low-g value can be extended by using a simply supported beam as the fixed electrode, but the high-G inertial needs more elasticity for fixed electrode. The simulation results indicate that the response time and contact time decrease with the increment in the designed threshold. Prototypes were tested using a dropping hammer system, and the test result indicates that the contact time of the inertial switch with a fixed electrode of the simply supported beam is about 15 and 5 μs when the threshold is about 280 and 580 g, respectively. Meanwhile, the contact time can be extended to 100 μs for the inertial switch using a spring as the fixed electrode when the threshold is about 280 and 580 g. These test results not only prove that the spring fixed electrode can effectively extend the contact time, but also prove that the style of the fixed electrode is the deciding factor affecting the contact time of the high-G inertial switch.