Shear mode FBARs as highly sensitive liquid biosensors

Weber, Jan; Albers, Willem M.; Tuppurainen, Jussipekka; Link, Mathias; Gabl, R.; Wersing, W.; Schreiter, Matthias

doi:10.1016/j.sna.2006.01.005

Cited by 183 publications

(109 citation statements)

References 3 publications

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“…However, higher frequency and smaller dimensions cause all of the environmental and boundary conditions to affect the operation of the tesonatots mote sttongly than the QCMs, tesulting in a highet noise level and lowet quality factots (Q). It is fot this teason that, to date, the tepotted empitical expetimentally detetmined mass sensitivity of thin film-based tesonatots is not significantly gteatet than that of QCMs [18][19][20].…”

Section: Introductionmentioning

confidence: 90%

“…In 1972, it was utilised for the first time to detect antibodies [11]. QCMs have a mass detection limit of a few nanograms, which is limited by low operation frequency (5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) due to the quartz substrate thickness. In this respect, the utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), extremely high frequency versions QCM with an operating frequency in the range of a few GHz, offers great potential to improve the sensitivity and detection limit of gravimetric sensors.…”

Section: Introductionmentioning

confidence: 99%

“…In the last few yeats thete has been significant wotk cattied out towatds the imptovement of the sttuctutal and electtical ptopetties of ZnO and A1N thin films fot theit use as the active material inthese devices [18][19][20][21][22][23][24] howevetthe Q_ factots ofthese tesonatots ate still lowet than those ofQCMs [25,26], limiting theit sensitivity.…”

Section: Introductionmentioning

confidence: 99%

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AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Garcia‐Gancedo

Zhu

Iborra

et al. 2011

Sensors and Actuators B: Chemical

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ARTICLE INFO ABSTRACTSolidly mounted resonators (SMRs) with a top carbón nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q.(>2000, compared to ~1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller ~ " frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators Keywords' Biosensor anc ' me ' r res P onses to mass-load from physically adsorbed coatings were investigated. Results show Carbón nanotube (CNT) tnat resonators using CNTs as the top electrode exhibited a higher frequency change for a given load Aluminum nitride (A1N) (~0.25 MHz cm 2 ng _1 ) compared to that of a metal thin film electrode (~0.14 MHz cm 2 ng _1 ), due to the Bulk acoustic wave resonator (BAW) lower mass of the CNT electrodes and their higher active surface área compared to that of a thin film Gravimetric biosensor metal electrode. It is therefore concluded that the use of CNT electrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed.

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Section: Introductionmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Garcia‐Gancedo

Zhu

Iborra

et al. 2011

Sensors and Actuators B: Chemical

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“…Previously reported Q of 15 in water indicates a 95% reduction in mass resolution compared with the one operating in the air. 8,9 We have previously demonstrated a method to improve the Q of L-FBARs in liquid environments by integrating a microfluidic channel to the resonator; 10 Q of up to 120 has been achieved. However, the unavoidable fact of squeeze damping and the critical height requirements of the microfluidic channel limited further improvements.…”

mentioning

confidence: 99%

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Choi

Chae

2010

Applied Physics Letters

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This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer—thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/cm2.

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“…Above the top electrode, the functional layer is deposited, which is designed to adsorb specific gases. Originating from the development of the FBAR as a biosensor (Weber et al, 2006), we use c axis-inclined ZnO as a piezoelectric material, which can generate shear mode waves that dissipate less in viscous media.…”

Section: Working Principle Of Fbar Gas Sensorsmentioning

confidence: 99%

The concept of thin film bulk acoustic resonators as selective CO<sub>2</sub> gas sensors

Hoffmann

Schreiter

Heitmann

2017

J. Sens. Sens. Syst.

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Abstract. Carbon dioxide (CO 2 ) is a gas that well represents air quality in indoor environments as well as being an important greenhouse gas. However, the reliable and affordable sensing of environmental CO 2 at room temperature, with techniques other than optical spectroscopy, remains an unsolved problem to this day. One major challenge for solid state sensors is the realisation of adequate selectivity, especially towards changing humidity. The thin film bulk acoustic resonator (FBAR) is a MEMS (Microelectromechanical systems) device that can not only detect gas-induced mass changes but also changes in the acoustic velocity and density of its layers. This multi-sensing provides a suitable platform for selective gas sensing. In this work we present studies done on polyaminosiloxane-and ethyl cellulose-functionalised FBARs regarding CO 2 sensitivity, selectivity towards humidity, and stability. We demonstrate how CO 2 and humidity signals can be separated and that CO 2 can be sensed with a resolution of 50 ppm between 400 and 1000 ppm. Using the Mason model, we show how the acoustic velocity and density of an absorption layer can be determined and how changes in those parameters affect the resonance frequency shift. The understanding of these results ultimately presents a tool to theoretically separate any number of gas analytes.

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Shear mode FBARs as highly sensitive liquid biosensors

Cited by 183 publications

References 3 publications

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

The concept of thin film bulk acoustic resonators as selective CO<sub>2</sub> gas sensors

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Shear mode FBARs as highly sensitive liquid biosensors

Cited by 183 publications

References 3 publications

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

The concept of thin film bulk acoustic resonators as selective CO&lt;sub&gt;2&lt;/sub&gt; gas sensors

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The concept of thin film bulk acoustic resonators as selective CO<sub>2</sub> gas sensors