A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Xu, Wen‐Cheng; Choi, Seokheun; Chae, Junseok

doi:10.1063/1.3309586

Cited by 57 publications

(29 citation statements)

References 13 publications

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“…This increase in peak height is important because it results in a higher quality factor. Alternative modes of vibration have been used in MEMS to increase the quality factor [23-26] because a higher quality factors allows for detection of smaller shifts in resonant frequency, which will increase the sensitivity of the sensor [27]. However, there has been no report on longitudinal modes of a silicon-based microcantilever presumably due to the difficulty in exciting and detecting such a mode.…”

Section: Introductionmentioning

confidence: 99%

Label-free Her2 detection and dissociation constant assessment in diluted human serum using a longitudinal extension mode of a piezoelectric microcantilever sensor

Capobianco

Adams

Shih

2011

Sensors and Actuators B: Chemical

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We have investigated real-time, label-free, in-situ detection of human epidermal growth factor receptor 2 (Her2) in diluted serum using the first longitudinal extension mode of a lead zirconate-lead titanate (PZT)/glass piezoelectric microcantilever sensor (PEMS) with H3 single-chain variable fragment (scFv) immobilized on the 3-mercaptopropyltrimethoxysilane (MPS) insulation layer of the PEMS surface. We showed that with the longitudinal extension mode, the PZT/glass PEMS consisting of a 1 mm long and 127 μm thick PZT layer bonded with a 75 μm thick glass layer with a 1.8 mm long glass tip could detect Her2 at a concentration of 6-60 ng/ml (or 0.06-0.6 nM) in diluted human serum, about 100 times lower than the concentration limit obtained using the lower-frequency flexural mode of a similar PZT/glass PEMS. We further showed that with the longitudinal mode, the PZT/glass PEMS determined the equilibrium H3-Her2 dissociation constant Kd to be 3.3±0.3 × 10-8 M consistent with the value, 3.2±0.28 ×10-8 M deduced by the surface plasmon resonance method (BIAcore).

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Section: Introductionmentioning

confidence: 99%

Label-free Her2 detection and dissociation constant assessment in diluted human serum using a longitudinal extension mode of a piezoelectric microcantilever sensor

Capobianco

Adams

Shih

2011

Sensors and Actuators B: Chemical

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“…19,20 However, because of the nonuniform displacement distribution, the sensors made from the traditional FBARs with common electrode layout also present the similar problem, i.e., the drop of the quality factor caused by the generation of the compressional waves and the deviation of the frequency shifts. 21,22 Therefore, the uniform vibration displacement of FBARs eagerly needs to be achieved through the optimization of the electrode geometry and dimensions like what have been done in QCRs.…”

Section: Introductionmentioning

confidence: 99%

Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes

2016

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A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator. The variational formulation based on two-dimensional scalar differential equations provides a theoretical foundation for the Ritz method adopted in our analysis. The resonant frequencies and vibration distributions for the thickness-extensional modes of this ring electrode resonator are obtained. The structural parameters are optimized to achieve a more uniform displacement distribution and therefore a uniform mass sensitivity, which guarantee the high accuracy and repeatable measurement for sensor detection in an air or a liquid environment. These results provide a fundamental reference for the design and optimization of the high quality sensor.

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“…Among them, the disk-shaped resonators were most intensively investigated (Yan et al 2005;Zhang et al 2005;Xu et al 2010;Lu et al 2010Lu et al , 2011Basu and Bhattacharyya 2011;Baghelani et al 2011), because they have a high Q-factor as well as a high frequency. However, the disk-shaped resonator suffers from small amplitude and requires precise fabrication.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, it is believed that effective and sensitive detection of CPR levels in blood has great potential in the application of healthcare field. In Xu et al's study (Xu et al 2010), an acoustic resonator of high quality factors (Qs) was reported and a ring-shaped piezoelectric AlN thin film was made as FBAR. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/cm 2 .…”

Section: Introductionmentioning

confidence: 99%

Analytical study on effect of ring geometry on frequency shift of piezoelectric ring-shaped resonator

Wang

Sagawa

et al. 2012

Microsyst Technol

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Ring-shaped resonators with one and fourpoint-outer-pinned supports have been designed in this work. The ring-shaped resonator reacts with a mass perturbation to provide eigenstate or frequency shifts which could transfer to electrical signals by piezoelectric effect. The aforementioned ring-shaped resonator is mainly comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO 2 deposited on the silicon-on-insulator wafer and expected to be a contour mode. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the theoretical analysis was conducted by ANSYS from two aspects including: (a) the view point of geometrical design and (b) the mass application methodology. When a mass perturbation (i.e., a liquid droplet) of 10 pg is homogeneously contacting on the top electrode of the resonator, frequency shifts from 2.11 to 4.07 kHz could be obtained when excited in the contour mode. Furthermore, the more stabled vibration behavior of resonator with four-pointpinned supports was approved by the computer stimulation of ANSYS analysis results.

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A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Cited by 57 publications

References 13 publications

Label-free Her2 detection and dissociation constant assessment in diluted human serum using a longitudinal extension mode of a piezoelectric microcantilever sensor

Label-free Her2 detection and dissociation constant assessment in diluted human serum using a longitudinal extension mode of a piezoelectric microcantilever sensor

Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes

Analytical study on effect of ring geometry on frequency shift of piezoelectric ring-shaped resonator

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