Shear-Horizontal Surface Acoustic Wave on Ca3TaGa3Si2O14 Piezoelectric Single Crystal

Suzuki, Ryoto; Suzuki, Masashi; Kakio, Shoji; Kimura, Noritoshi

doi:10.1109/eftf/ifcs54560.2022.9850484

Cited by 1 publication

(3 citation statements)

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“…23) Moreover, we have tentatively calculated the most influential second-order temperature coefficient of the elastic constant c 44 of CTGS by fitting the measured and analytical results. 24) In this study, the propagation and resonance properties of SH SAW on CTGS (0°, θ, 90°) with Au-or Al-IDTs were investigated theoretically and experimentally. Moreover, the resonance properties of SH SAW were evaluated experimentally up to 570 °C, and the second-order temperature coefficients of the elastic constants of CTGS were determined for not only c 44 but also c 14 by performing a more detailed fitting to estimate the temperature characteristics of SH SAW on CTGS with any cut angle.…”

Section: Introductionmentioning

confidence: 99%

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Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures

Suzuki

Kakio

et al. 2023

Jpn. J. Appl. Phys.

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The resonance properties shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 (CTGS) with Au or Al interdigital transducers (IDTs) were investigated. IDT-type resonators were fabricated on CTGS (0°, 134° or 155°, 90°) using Au- or Al-IDT, and the strong resonance properties and near-zero temperature coefficient of frequency (TCF) were measured at a certain electrode film thickness. From the measured and simulated results, an effective coupling factor of approximately 1.2% and zero TCF can be simultaneously obtained by using not only a high-density Au-IDT but also a conventional Al-IDT and by adjusting the cut angle and electrode film thickness. Moreover, the resonance properties on Au-IDT/CTGS were evaluated at temperatures up to 570 °C. From the cut-angle dependences of the frequency shift calculated using the determined second-order temperature coefficients of the elastic constants, the potential for sensor applications that measure not only temperature but also pressure in such high-temperature environments can be expected.

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Section: Introductionmentioning

confidence: 99%

“…14. (Color online) Measured resonance property of SH SAW on Au-IDT/CTGS (0°, 155°, 90°) with λ = 32 μm before and after heating 24).…”

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confidence: 99%

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Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures

Suzuki

Kakio

et al. 2023

Jpn. J. Appl. Phys.

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Shear-Horizontal Surface Acoustic Wave on Ca₃TaGa₃Si₂O₁₄ Piezoelectric Single Crystal

Cited by 1 publication

References 5 publications

Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures

Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures

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Shear-Horizontal Surface Acoustic Wave on Ca3TaGa3Si2O14 Piezoelectric Single Crystal

Cited by 1 publication

References 5 publications

Resonance properties of shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 at room and high temperatures

Resonance properties of shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 at room and high temperatures

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Product

Resources

About

Shear-Horizontal Surface Acoustic Wave on Ca₃TaGa₃Si₂O₁₄ Piezoelectric Single Crystal

Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures

Resonance properties of shear-horizontal surface acoustic waves on Ca₃TaGa₃Si₂O₁₄ at room and high temperatures