Abstract:The resonance properties shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 (CTGS) with Au or Al interdigital transducers (IDTs) were investigated. IDT-type resonators were fabricated on CTGS (0°, 134° or 155°, 90°) using Au- or Al-IDT, and the strong resonance properties and near-zero temperature coefficient of frequency (TCF) were measured at a certain electrode film thickness. From the measured and simulated results, an effective coupling factor of approximately 1.2% and zero TCF can be simultaneousl… Show more
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