Shear horizontal surface acoustic wave COMSOL modeling on lithium niobate piezoelectric substrate

Ten, Seng Teik; Hashim, U.; Liu, Weiwen; Foo, K. L.; Voon, C. H.; Hisham, Hashim; Nazwa, T.; Sudin, Ahmad; Humaira, M.S. Nur

doi:10.1109/smelec.2014.6920806

Cited by 2 publications

(1 citation statement)

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“…In contrast to FEM/BEM, pure FEM is generally effective and quite flexible: it allows one to handle arbitrary materials cuts, electrode shapes and multi-layered substrate, etc. [ 36 , 37 ]. Therefore, the pure FEM method is widely used to study the behavior of resonators even with more complicated structures and multilayer piezoelectric substrates.…”

Section: Introductionmentioning

confidence: 99%

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Zhang

Chen

et al. 2021

Micromachines

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Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

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Section: Introductionmentioning

confidence: 99%