Shear force sensor using a cantilever with liquid-embedded hinges

Dynamic performance analysis of a micro cantilever embedded in elastomer

“…The size of each element of the cantilever and the Ni layer thickness are selected to ensure that the cantilever structure stands at nearly a right angle (figure 2(b)). The detailed fabrication process for the standing cantilever is provided in previous works [15,16].…”

“…These sensing elements are often embedded in or combined with soft, human-skin-like materials, such as polyurethane rubber [12][13][14]. We previously reported on MEMS tactile sensors based on a piezoresistive standing cantilever covered with polydimethylsiloxane (PDMS) for high-resolution tactile sensing in the shear direction [15][16][17]. The standing cantilever is small and thin enough to easily follow the quasi-static shear deformation of the PDMS covering, even if the cantilever structure has a much higher Young's modulus than the PDMS covering.…”

Dynamic response of tactile sensor applying cantilever in elastomer

“…As it is shown in figure 2 (b), by applying a magnetic field, the nickel plate part was magnetized and the standing cantilever structure was formed. The details of the cantilever fabrication process were reported in a previous works [5,6]. The tactile sensor structure completes by embedding the standing cantilever chip into the PDMS (figure 2 (c)).…”

“…We also reported MEMS tactile sensors utilizing a piezoresistive standing cantilever, which is covered with polydimethylsiloxane (PDMS), for shear stress/strain sensing in previous studies [5,6] (figure 1). However, since our previous studies focused only on their static characteristics, the sensor's capability of following an oscillating input is unclear.…”