Dynamic response of tactile sensor applying cantilever in elastomer

Hosono, Minako; Noda, Kentaro; Matsumoto, Kiyoshi; Shimoyama, Isao

doi:10.1109/transducers.2013.6626711

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…For these purposes, relationships between hand feeling and the surface properties of objects, such as roughness, elasticity and heat transfer property, has been studied [1]. Various types of MEMS sensors using a piezoresistive cantilever embedded by PDMS [2] and an array of capacitive sensors [3][4][5] have been proposed for this purpose.…”

Section: Introductionmentioning

confidence: 99%

Stylus type MEMS texture sensor covered with corrugated diaphragm

Tsukamoto

Asao

Tanaka

2017

J. Micromech. Microeng.

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In this paper, a stylus type MEMS texture sensor covered with a corrugated palylene diaphragm, which prevent debris from jamming into the sensor without significant degradation of sensitivity and bandwidth, was reported. A new fabrication process using a lost-foil method to make the corrugated diaphragm on a 3-axis piezoresistive force sensor at wafer level has been developed. The texture sensor could detect the surface microstructure as small as about 10 in lateral direction and 1.7 in vertical direction. The output signals from the sensor were repeatable, and the Z-axis signal was almost the same regardless of the moving direction, indicating that the hysteresis was small enough. In addiiton, the bandwidth as wide as 1.1 kHz and 500 Hz in lateral and vertical directions, respectively, were confirmed. The surface roughness and friction coefficient of various materials were successfully detected by the fabricated texture sensor.

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