Shape optimizations and static/dynamic characterizations of deformable microplate structures with multiple electrostatic actuators

Abstract

Micromirrors used in many optoelectronic devices can be considered as microplates. The functions and accuracy of the micromirrors depend on the static and dynamic deflection shapes of microplates. The objective of this study is to develop an efficient method for predicting the shapes of the microplates subjected to unsymmetrical electrostatic forces produced by electrostatic actuators such that micromirrors can be effectively optimized and controlled in their real time operation. The non-classical boundary conditions which result from the microfabrication process were modeled with artificial springs at the edges. A classical energy method using boundary characteristic orthogonal polynomials was applied to formulate the equations of motion of the microsystem. Based on this method, influence functions were built and least squares method was used to optimize the desired deflection under electrostatic forces from the electrostatic actuators. Softening effect of the electrostatic stiffness was also evaluated and considered in the simulation. Static deflections and dynamic responses were compared with those from finite element analysis (FEA) using Reduced Order Modeling (ROM) method. This study found that the static and dynamic responses of microplates predicted from the proposed method were highly consistent with those calculated from FEA. However, the proposed method is simpler and more efficient than FEA and can be conveniently used for any non-classical boundary condition situations. These features make the proposed method useful to effectively control and optimize the shape of a microplate with multiple electrostatic actuators.

3D heterostructures and systems for novel MEMS/NEMS

“…For such a system to act as an actuator, one or both plates should be movable and fixed to an elastic compensator. A spring [31][32][33][34] or a viscous liquid [35] can be used as the compensator. The system is at equilibrium when the elastic force due to the spring is balanced by the electrostatic attracting force:…”