3D heterostructures and systems for novel MEMS/NEMS

Prinz, Victor Yakovlevich; Селезнев, В. Д.; Prinz, Alexander V.; Kopylov, Alexander Vladimirovich

doi:10.1088/1468-6996/10/3/034502

Cited by 35 publications

(8 citation statements)

References 63 publications

(93 reference statements)

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“…[7][8][9][10] At the same time, the self-rolling of thin pseudomorphically strained semiconductor bilayer systems based on epitaxial heterojunctions grown by molecular-beam epitaxy have been proposed by Prinz and co-workers. 11,12 The optics in microtube ring resonators 13,14 and the transport of electrons on cylindrical surfaces [15][16][17][18] represent remarkable demonstrations of the new physical properties on curved surfaces. The rolled-up semiconductors, as well as nanocarbon materials of carbon nanotubes, 19 folded graphene, 20,21 and carbon nanoscrolls, 22,23 enable investigation of fundamental physical properties in a nontrivial geometry on curved surfaces.…”

Section: Introductionmentioning

confidence: 99%

Mechanical vibration of a cylindrically rolled-up cantilever shell in microelectromechanical and nanoelectromechanical systems

et al. 2012

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The mechanical vibration of a cylindrically rolled-up cantilever shell is studied for possible use as microand nano-electromechanical systems. The system is modeled as an isotropic open circular cylindrical shell of rectangular planform that is clamped along one straight edge and is free on the other three edges. The mechanical vibration is calculated using both numerical and analytical methods. The frequencies of the axial wave modes strongly increase when the curvature of the shell increases because the curvature induces in-plane extension. The frequencies of the bending in the circumference direction and twisting modes show weaker curvature dependence. Frequencies as a function of the curvature for the axial wave modes obey a scaling law different from that for the bending and twisting modes. Several possible electromechanical coupling mechanisms in microand nano-electromechanical systems are considered.

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Section: Introductionmentioning

confidence: 99%

Mechanical vibration of a cylindrically rolled-up cantilever shell in microelectromechanical and nanoelectromechanical systems

et al. 2012

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“…The flattened membranes resulting from this process provide model systems for fundamental scientific studies of crystalline sheets with nanoscale thicknesses, free from the influence of a supporting substrate and with greatly reduced artifacts from strain variations and curvature. In addition, within the SiGe/Si nanomembrane system flattened structures can find applications in freestanding chemical and gas sensors [25,26], micro-and nano-electro-mechanical devices [27][28][29], thermal waveguides and thermal diodes [30], and flexible thin film transistors with high-current drive capacity and high electron mobility [10].…”

Section: Resultsmentioning

confidence: 99%

Fabrication of flat SiGe heterostructure nanomembrane windows via strain-relief patterning

McElhinny

Gopalakrishnan

Savage

et al. 2014

J. Phys. D: Appl. Phys.

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The lattice mismatch between SiGe and Si in heteroepitaxial Si/SiGe/Si trilayers leads to buckling when confined nanomembrane windows formed from these heterostructures are released from silicon-on-insulator substrates. We demonstrate that large areas in which the curvature and curvature-induced strain are reduced by an order of magnitude can be produced by patterning the windows to concentrate buckling in narrow arms with low flexural rigidity supporting a flat central region. Synchrotron x-ray thermal diffuse scattering shows that the improved flatness of patterned windows permits fundamental studies with fidelity similar to what can be achieved with flat single-component Si nanomembranes.

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“…In order to control shapes in nano‐ and microscale fabrication, gradients of mechanical stresses in thin films have become a rapidly growing field of research in the past few decades. Such gradients may have different origins, like the misfit of crystal lattice in the epitaxially grown multilayer semiconductor heterostructures or selective swelling of components of multilayer polymer films . These stress gradients are attractive because their relaxation causes film deformations, such as film rolling, wrinkling, or combination of these phenomena .…”

Section: Introductionmentioning

confidence: 99%

Laser‐Assisted Strain Engineering of Thin Elastomer Films to Form Variable Wavy Substrates for Cell Culture

Tomba

Petithory

Pedron

et al. 2019

Small

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Endothelial and epithelial cells usually grow on a curved environment, at the surface of organs, which many techniques have tried to reproduce. Here a simple method is proposed to control curvature of the substrate. Prestrained thin elastomer films are treated by infrared laser irradiation in order to rigidify the surface of the film. Wrinkled morphologies are produced upon stress relaxation for irradiation doses above a critical value. Wrinkle wavelength and depth are controlled by the prestrain, the laser power, and the speed at which the laser scans the film surface. Stretching of elastomer substrates with a “sand clock”‐width profile enables the generation of a stress gradient, which results in patterns of wrinkles with a depth gradient. Thus, different combinations of topography changes on the same substrate can be generated. The wavelength and the depth of the wrinkles, which have the characteristic values within a range of several tens of µm, can be dynamically regulated by the substrate reversible stretching. It is shown that these anisotropic features are efficient substrates to control polarization of cell shapes and orientation of their migration. With this approach a flexible tool is provided for a wide range of applications in cell biophysics studies.

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3D heterostructures and systems for novel MEMS/NEMS

Cited by 35 publications

References 63 publications

Mechanical vibration of a cylindrically rolled-up cantilever shell in microelectromechanical and nanoelectromechanical systems

Mechanical vibration of a cylindrically rolled-up cantilever shell in microelectromechanical and nanoelectromechanical systems

Fabrication of flat SiGe heterostructure nanomembrane windows via strain-relief patterning

Laser‐Assisted Strain Engineering of Thin Elastomer Films to Form Variable Wavy Substrates for Cell Culture

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