Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer

Poly(styrene)-block-Maltoheptaose Films for Sub-10 nm Pattern Transfer: Implications for Transistor Fabrication

“…Initial results from a study reported elsewhere, including NR analysis of TMA/H 2 O infiltration into the BCP system PS- b -MH with molecular weight 4.5k- b -1.2k indicate that the Al 2 O 3 content of the BCP is 2.4 vol % after four dynamic infiltration cycles, which is 18% of the Al 2 O 3 content in MH homopolymer after the same treatment. As the volumetric fraction of MH in the BCP is 19%, using the experimental densities found in this study (1.42 g/cm 3 for MH, and 1.06 g/cm 3 for PS), we conclude that the initial results from NR analysis of TMA/H 2 O infiltration into the BCP system PS- b -MH are in line with the homopolymer infiltration results presented here.…”

“…Neutron reflectometry was performed in air using a monochromatic beam at a wavelength of λ = 5.21 Å, at the Swedish collaborative research group (CRG) instrument Super-ADAM, Institut Laue-Langevin (ILL), Grenoble, France. 39 , 40 In specular reflectometry, an incident neutron beam of intensity I 0 is impinging a sample surface at angle θ, and the intensity I of the beam reflected at the same angle is measured (see Figure S8 in the Supporting Information). The ratio I / I 0 , called reflectivity R , is measured as a function of Q z —a component of neutron momentum transfer perpendicular to the sample surface, 38 where A span of Q z , in a range from 0.005 to 0.17 Å –1 , was achieved by scanning incidence angle θ from 0.12 to 4.0°.…”

“…The ratio I / I 0 , called reflectivity R , is measured as a function of Q z —a component of neutron momentum transfer perpendicular to the sample surface, 38 where A span of Q z , in a range from 0.005 to 0.17 Å –1 , was achieved by scanning incidence angle θ from 0.12 to 4.0°. The raw data 40 was first reduced by subtracting background, normalizing the reflected intensity to that of the direct beam I 0 , and correcting for overillumination of the sample, all using pySAred software. 41 The data was thereafter analyzed using the software GenX , 42 which uses Parratt recursion to simulate specular reflectivity by modeling in-depth organization of a sample.…”