Sequencing optimisation for makespan improvement at wet-etch tools

Rotondo, Anna; Young, Paul; Geraghty, John

doi:10.1016/j.cor.2014.04.016

Cited by 8 publications

(9 citation statements)

References 47 publications

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“…An AWS scheduling problem with 𝐶 max is tackled by Rotondo et al (2015). Wafer batches are sequenced by a GA, while the internal scheduling is carried out via a proprietary algorithm by the tool vendor.…”

Section: External Ct Scheduling Approaches For Single-machine Environ...mentioning

confidence: 99%

An Integrated Method for External and Internal Scheduling of Parallel Cluster Tools

YANG,

Mönch

2024

Preprint

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Cluster tools are integrated machines for wafer processing in semiconductor wafer fabrication facilities (wafer fabs). Since different kinds of wafers can circulate in a cluster tool simultane-ously, it is a fully automated machine environment. The development of scheduling ap-proaches for these extremely expensive machines is essential for improving their operations. We study a scheduling problem on the work center level, i.e. for parallel cluster tools. The performance measure is the total weighted tardiness. All jobs are available at scheduling time. Two different biased random-key genetic algorithms (BRKGAs) are designed to assign jobs to cluster tools and to compute sequences for each single cluster tool. We establish algorithms to compute the time a job spent in a cluster tool, called processing time, given the sequence in which the jobs are processed there. They are embedded into the BRKGAs. Computational ex-periments based on randomly generated problem instances are carried out. The results demon-strate that the proposed metaheuristics perform well with respect to solution quality and com-puting time.

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Section: External Ct Scheduling Approaches For Single-machine Environ...mentioning

confidence: 99%

An Integrated Method for External and Internal Scheduling of Parallel Cluster Tools

YANG,

Mönch

2024

Preprint

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“…Meanwhile, Rotondo et al proposed an optimization model for sequencing batches of wafers outside a wet-etch tool and scheduling of tool internal handler moves [37]. Unlike other authors, these studies address an application of a real manufacturing plant where the wet-etch tools' internal mechanisms are not easy to modify because they are established by the tool vendor.…”

Section: Automated Wet-etch Scheduling Problemmentioning

confidence: 99%

Optimal Scheduling for Automated Wetetch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming

García-Mata,

Burtseva,

Werner

2024

Preprint

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Scheduling and optimization have a central place in the research area of computing because it is increasingly important to achieve fully automated production processes to adjust manufacturing systems to the requirements of Industry 4.0. In this paper, we demonstrate how an automated wet-etch scheduling problem for a semiconductor industry can be solved by constraint answer set programming (CASP) and, its solver called clingcon. The considered scheduling problem includes a robot for lot transfers between the baths. CASP is a hybrid approach in automated reasoning that combines different research areas such as answer set programming, Constraint Processing and Satisfiability Modulo Theories. For a long time, exact methods such as constraint programming have displayed difficulties in solving real large-scale problem instances. Currently, the performance of state-of-the-art constrains solvers is comparatively better than a decade ago, and some complex combinatorial problems can be optimally solved. These theoretical and technical achievements open new horizons for declarative programming applications such as logistics. A successful solution to this problem is achieved and we found that in most cases tested, CASP is faster and obtains in most cases similar makespan values than solutions based on mixed integer linear programming and constraint paradigms.

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“…However, only a few researchers have reported optimized solutions to the AWS scheduling problem using a combinatorial approach. One of them is Zeballos et al [46] who reported a successful solution with CP combined with different research strategies. These authors reported experimental results with up to three robots, obtaining better results than those obtained by the MILP methodology combined with the Guided Variable Domain Reduction (GVDR) strategy.…”

Section: Automated Wet-etch Scheduling Problemmentioning

confidence: 99%

Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming

García-Mata,

Burtseva,

Werner

2024

Processes

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Scheduling and optimization have a central place in the research area of computing because it is increasingly important to achieve fully automated production processes to adjust manufacturing systems to the requirements of Industry 4.0. In this paper, we demonstrate how an automated wet-etch scheduling problem for the semiconductor industry can be solved by constraint answer set programming (CASP) and its solver called clingcon. A successful solution to this problem is achieved, and we found that for all tested problems, CASP is faster and obtains smaller makespan values for seven of the eight problems tested than the solutions based on mixed integer linear programming and constraint paradigms. The considered scheduling problem includes a robot for lot transfers between baths. CASP is a hybrid approach in automated reasoning that combines different research areas such as answer set programming, constraint processing, and Satisfiability Modulo Theories. For a long time, exact methods such as constraint programming have displayed difficulties in solving real large-scale problem instances. Currently, the performance of state-of-the-art constraint solvers is comparatively better than a decade ago, and some complex combinatorial problems can be better solved. These theoretical and technical achievements open new horizons for declarative programming applications such as logistics.

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Sequencing optimisation for makespan improvement at wet-etch tools

Cited by 8 publications

References 47 publications

An Integrated Method for External and Internal Scheduling of Parallel Cluster Tools

An Integrated Method for External and Internal Scheduling of Parallel Cluster Tools

Optimal Scheduling for Automated Wetetch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming

Scheduling of Automated Wet-Etch Stations with One Robot in Semiconductor Manufacturing via Constraint Answer Set Programming

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