An Integrated Method for External and Internal Scheduling of Parallel Cluster Tools
FAJUN YANG,
Lars Mönch
Abstract:Cluster tools are integrated machines for wafer processing in semiconductor wafer fabrication facilities (wafer fabs). Since different kinds of wafers can circulate in a cluster tool simultane-ously, it is a fully automated machine environment. The development of scheduling ap-proaches for these extremely expensive machines is essential for improving their operations. We study a scheduling problem on the work center level, i.e. for parallel cluster tools. The performance measure is the total weighted tardiness… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.