Sensitivity of Surface Acoustic Wave Magnetic Sensors Composed of Various Ni Electrode Structures

Kadota, Michio; Ito, Shigeo

doi:10.7567/jjap.51.07gc21

Cited by 19 publications

(19 citation statements)

References 10 publications

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“…In a magnetostrictive thin film, a coupling between the AC/DC module and the structural mechanics module was implemented. To verify if the magnetoelastic interaction calculation in our model is correct, a half period of Ni-IDT/quartz SAW resonator [12] was first studied ( Fig. 1).…”

Section: ;mentioning

confidence: 99%

“…As one can observe, the higher the metallization ratio, the higher the sensitivity, particularly in the Y direction. For this reason a metallization ratio of 80%, which is elevated but still compatible with a practical implementation, was used as in [12] to study the magnetic characteristics of the SAW sensor. Using a 80% metallization ratio, the relative frequency shift ( Fig.…”

Section: Figmentioning

confidence: 99%

“…Recent developments have enabled the elaboration of magnetic field SAW sensors by combining magnetostrictive and piezoelectric materials [12][13][14][15]. Magnetic SAW devices such as a SAW delay line made of TbCo2/FeCo/Y-cut LiNbO3 [13] and SAW resonators with Ni electrodes/quartz [12] were reported. However additional efforts need to be made in order to increase the sensitivity to the magnetic field of such structures.…”

Section: Introductionmentioning

confidence: 99%

“…This paper is organized as follows: in section 2, we describe the development of a numerical model to study magnetic field SAW sensors, which is, in a first step, successfully confronted to experimental results previously published by Kadota &al. [12]. In section 3, we use this model to study extensively a new layered structure, in terms of insertion loss, sensitivity to the magnetic field in two in-plane directions, the quality factor and to describe the impact of using harmonics.…”

Section: Introductionmentioning

confidence: 99%

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Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelastic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al., obtained with SAW resonators based on quartz substrates and nickel InterDigital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al2O3/IDT/LiNbO3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.

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Section: ;mentioning

confidence: 99%

Section: Figmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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“…Kodota et al subsequently presented a new prototype of SAW magnetic sensor using interdigital transducers (IDTs) made by magnetostrictive Ni electrodes on a quartz substrate and wireless and passive measurement was offered. Obtained magnetic sensitivity was 730 Hz/mT [6,7]. Elhosni et al proposed a similar SAW magnetic sensor with a magnetostrictive-piezoelectric layered structure of Ni/ZnO/IDT/LiNbO 3 , and the corresponding finite element modeling (FEM) simulation was performed to predict the sensor performance [8,9].…”

Section: Introductionmentioning

confidence: 99%

Development of a Magnetostrictive FeNi Coated Surface Acoustic Wave Current Sensor

et al. 2017

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Featured Application: The developed magnetostrictive FeNi coated Surface acoustic wave sensor with high sensitivity; fast response; strong anti-interference; good linearity and repeatability; and lower hysteresis error will be a potential candidate for current monitoring application in smart grid line testing; metallurgical and power supplies; rail transit safety warnings and rescue.Abstract: A magnetostrictive FeNi-coated surface acoustic wave (SAW)-based current sensor was proposed in this work. The weak remanence and hysteresis effect of the FeNi itself contributes to suppress the asymmetry in sensor response at increasing and decreasing current. The sensor response was simulated by solving the coupled electromechanical field equation in layered structure considering the magnetostrictive effect and an approach of effective dielectric constant. The effects from the aspect ratio and thickness of the FeNi film on sensor response were analyzed to determine the optimal design parameters. Differential oscillation structure was used to form the sensor, in which, the FeNi thin film was deposited along the SAW propagation of the sensor chip by using RF magnetron sputtering. The magnetostrictive effect of the FeNi coating induced by the magnetic loading generates the perturbation in SAW velocity, and corresponding oscillation frequency. High sensitivity of 10.7 KHz/A, good linearity and repeatability, lower hysteresis error of 0.97% were obtained from the developed prototype 150 MHz SAW FeNi coated current sensor.

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Magnetoelectric heterostructures for next-generation MEMS magnetic field sensing applications

Kumar

Kaur

2022

Journal of Alloys and Compounds

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Sensitivity of Surface Acoustic Wave Magnetic Sensors Composed of Various Ni Electrode Structures

Cited by 19 publications

References 10 publications

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Development of a Magnetostrictive FeNi Coated Surface Acoustic Wave Current Sensor

Magnetoelectric heterostructures for next-generation MEMS magnetic field sensing applications

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