Sensitivity and power modeling of CMOS mems single axis convective accelerometers

Mezghani, Brahim; Tounsi, Farès; Rekik, A.; Mailly, F.; Masmoudi, Mohamed; Nouet, Pascal

doi:10.1016/j.mejo.2013.06.006

Cited by 19 publications

(6 citation statements)

References 14 publications

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“…As a consequence, a production yield of more than 99.8% could be obtained for low-cost products using only electrical tests for the calibration scheme [ 61 ]. Modelling method was further studied to improve the behavioral model accuracy of accelerometer [ 28 , 53 , 54 , 55 ], and the electrical calibration strategy was improved for its better robustness [ 62 ].…”

Section: Key Technologies Of Micromachined Fluid Inertial Sensorsmentioning

confidence: 99%

“…Since then, many studies have been conducted on these sensors. Most of the studies have focused on improving the sensor performance by optimizing the fluid medium with proper thermal properties (e.g., thermal conductivity, thermal diffusivity, kinematic viscosity), temperature sensing (e.g., thermal couple, thermistor), the material of the thermistor (e.g., metal thermistor, polysilicon thermistor, silicon PN junction thermistor) and the structure of the sensor (e.g., cavity shape and size, cap shape and size, distribution and size of the heater and thermistors) [ 6 , 7 , 8 , 9 , 10 , 11 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 ]. Combinations of Finite-Element-Modeling (FEM) simulation and experimental validation are the most commonly-used research methods.…”

Section: Introductionmentioning

confidence: 99%

“…Modeling and simulation technology have achieved great progress in the past decades. More accurate behavioral models were established for guiding and evaluating subsequent design [ 22 , 25 , 26 , 27 , 28 , 41 , 49 , 54 , 55 , 56 ]. The establishment of the Hardware Description Language (HDL) model of the accelerometer made it possible to design the sensor and Application Specific Integrated Circuit (ASIC) simultaneously at the system level [ 56 , 57 ].…”

Section: Introductionmentioning

confidence: 99%

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Micromachined Fluid Inertial Sensors

Liu

Zhu

2017

Sensors

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Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.

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Section: Key Technologies Of Micromachined Fluid Inertial Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micromachined Fluid Inertial Sensors

Liu

Zhu

2017

Sensors

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“…Furthermore, the heating power is one of the critical factors for the design of this type of sensor. Previously reported thermal convective sensors [28][29][30] require a high heating power (in the order of tens of milliwatts) in order to maintain high temperatures. Experiments were carried out in order to determine the effect of the input power on the performance.…”

Section: Effect Of Heating Power On Sensitivitymentioning

confidence: 99%

“…According to studies, [28][29][30] there are ways to improve the sensitivity, achieve a good response to environmental parameters, and optimize the performance of this convection-based sensor induced by modeling and analysis of the structural geometry. So far, a few models that study the impact of the sensor design, temperature profile, gas type, and pressure on sensitivity have been reported.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity improvement of a thermal convection-based tilt sensor using carbon nanotube

Han

Kim

Bae

et al. 2017

Jpn. J. Appl. Phys.

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This paper presents a thermal convection-based sensor, which is fabricated using carbon nanotube (CNT) yarn. The key element in this device is the non-symmetrically distributed, heated air medium around the heater, particularly when it experiences acceleration and/or changes in inclination. Therefore, it can withstand much higher accelerations/inclination than conventional sensors that use a proof mass. However, a major challenge for the design of this type of sensor is the high heating power (in the order of tens of milliwatts) required to facilitate thermal convection in a sealed chamber. In order to reduce the high heating power, CNTs are investigated as materials for both the heater and the temperature sensors. Moreover, this paper discusses experiments that were performed by varying several parameters, such as the heating power, distance between the heater and temperature sensors, the gas medium used, and air pressure.

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