Development of an accurate heat conduction model for micromachined convective accelerometers

Mezghani, Brahim; Tounsi, Farès; Masmoudi, Mohamed

doi:10.1007/s00542-014-2079-x

Cited by 11 publications

(15 citation statements)

References 13 publications

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“…Most conventional accelerometers detect the acceleration using a solid proof mass and are based on the changes in the capacitance [ 1 , 2 ] or the piezo effect [ 3 , 4 ]. However, MEMS-based accelerometers based on the proof-mass system suffer from problems such as electromagnetic interference (EMI), the effect of parasitic electrostatic force, and fabrication complexity [ 5 , 6 , 7 , 8 , 9 ]. To overcome these problems, a thermal type of MEMS-based accelerometer that does not require a solid proof mass has been developed and fabricated, as described in previous papers [ 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Han

Kim

Park

et al. 2017

Sensors

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This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is the thermal convection of a gas medium, a simple model is proposed and developed in which the performance of the thermal convection–based accelerometer is closely associated with the Grashof number, Gr and the Prandtl number, Pr. This paper discusses the experiments that were performed by varying several parameters such as the heating power, cavity size, gas media, and air pressure. The experimental results demonstrate that an increase in the heating power, pressure, and cavity size leads to an increase in the accelerometer sensitivity. However, an increase in the pressure and/or cavity size results in a decrease in the frequency bandwidth. This paper also discusses the fact that a working-gas medium with a large thermal diffusivity and small kinematic viscosity can widen the frequency bandwidth and increase the sensitivity, respectively.

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Section: Introductionmentioning

confidence: 99%

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Han

Kim

Park

et al. 2017

Sensors

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“…However, the expansion of the sealed space in the bottom wafer did not improve the output of the top wafer correspondingly with the expansion. 25,30) This is believed to be due to the low density of hot air which rises readily, and as a result, the expansion of the bottom wafer does not have a significant impact on the sensor's sensitivity.…”

Section: Evaluating Tilt Propertiesmentioning

confidence: 99%

“…23,30) The size of the interior space of the PDMS which acts as the sealed space was increased and the output properties were compared. As shown in Fig.…”

Section: Evaluating Tilt Propertiesmentioning

confidence: 99%

“…It can also be observed that even when other conditions are the same, the heater's shape alone improves the output of the sensor. 25,[28][29][30] In the experiments below, we analyzed the changes in the properties of the circle sensor type, which has the greatest sensitivity.…”

Section: Evaluating Tilt Propertiesmentioning

confidence: 99%

“…Moreover, the movement of air becomes faster due to the larger space, making its movement more effective, and thus improving the reliability of the sensor's output properties. 23,25,29,30) The empty space at the bottom of the heater and the temperature sensor was expanded. By extending the XeF 2 dry etching time, two types of sensors were fabricated, the existing 100 µm and the expanded 150 µm sizes (2 mm of top cavity).…”

Section: Evaluating Tilt Propertiesmentioning

confidence: 99%

See 2 more Smart Citations

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

Han

Kim

Kong

et al. 2018

Jpn. J. Appl. Phys.

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This paper reports a micro-electro-mechanical-system (MEMS)-based tilt sensor using air medium. Since the working mechanism of the sensor is the thermal convection in a sealed chamber, structural parameters that can affect thermal convection must be considered to optimize the performance of the sensor. This paper presents the experimental results that were conducted by optimizing several parameters such as the heater geometry, input power and cavity volume. We observed that an increase in the heating power and cavity volume can improve the sensitivity, and heater geometry plays important role in performance of the sensor.

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Enhanced 3-axis sensitivity of a CMOS MEMS convective accelerometer using a new power efficient heater structure

et al. 2022

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Development of an accurate heat conduction model for micromachined convective accelerometers

Cited by 11 publications

References 13 publications

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

Enhanced 3-axis sensitivity of a CMOS MEMS convective accelerometer using a new power efficient heater structure

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