2020
DOI: 10.3390/mi11121030
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Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics

Abstract: In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was analyzed using a mode split approach, having a drive resonant frequency of 24,918 Hz, with the x-sense, y-sense, and z-sense being 25,625, 25,886, and 25,806 Hz, respect… Show more

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Cited by 3 publications
(5 citation statements)
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“…These specific conditions, which align with the drug release profile, will be further evaluated in the context of nanoparticle drug release. 61 The comprehensive analysis of the factors derived from the overall model in COMSOL is presented in Fig. S2, which also illustrates the finite element method (FEM) triangular mesh of the computational model.…”
Section: Resultsmentioning
confidence: 99%
“…These specific conditions, which align with the drug release profile, will be further evaluated in the context of nanoparticle drug release. 61 The comprehensive analysis of the factors derived from the overall model in COMSOL is presented in Fig. S2, which also illustrates the finite element method (FEM) triangular mesh of the computational model.…”
Section: Resultsmentioning
confidence: 99%
“…The proposed design approach for estimating and reducing the cross-axis sensitivity of a single-drive multi-axis MEMS gyroscope was based on a previous published work and FEA methodology using COMSOL Multiphysics [ 28 ]. This design approach consisted of two phases, (i) estimation phase and (ii) reduction phase of cross-axis sensitivity in the designed gyroscope, as shown in the workflow Figure 6 .…”
Section: Design Approachmentioning
confidence: 99%
“…This design approach consisted of two phases, (i) estimation phase and (ii) reduction phase of cross-axis sensitivity in the designed gyroscope, as shown in the workflow Figure 6 . The CAS estimation phase consisted of several FEA analyses, including structure designing, modal analysis, drive, and sense mode analyses, which is explained in detail in our previous work [ 28 ]. In sense mode analysis, cross-axis sensitivity was estimated using two-point method.…”
Section: Design Approachmentioning
confidence: 99%
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