Sensing Tilt With MEMS Accelerometers

Łuczak, Sergiusz; Oleksiuk, Waldemar; Bodnicki, M.

doi:10.1109/jsen.2006.881433

Cited by 125 publications

(57 citation statements)

References 8 publications

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“…1 illustrates the respective kinematics of the test rig, where:  -pitch angle (indicated by the tested sensor), -roll angle, -complement of angle (indicated indirectly by the tested sensorsee Eq. (2)) as proposed by the author et al in [12], g -gravitational acceleration, gx, gy, gzCartesian components of the acceleration g. The coordination system x0y0z0 is immovable, and the axis z0 overlaps direction of the gravitational acceleration. The coordination system xyz is attached to the tested tilt sensor.…”

Section: Geometrical Relationshipsmentioning

confidence: 97%

“…5 illustrates indication errors of a tested tilt sensor built of two MEMS accelerometers ADXL 202E manufactured by Analog Devices Inc., oriented perpendicularly to each other (thus measuring the three Cartesian components of the gravitational acceleration). The accuracy of the sensor can be evaluated with the error expressed over axis y, which has been defined by the author et al in [12] as follows:…”

Section: Experimental Studiesmentioning

confidence: 99%

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Dual-Axis Test Rig for Mems Tilt Sensors

Łuczak¹

2014

Metrology and Measurement Systems

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The paper addresses the problem of experimental studies of miniature tilt sensors based on low-range accelerometers belonging to Microelectromechanical Systems (MEMS). A custom computer controlled test rig is proposed, whose kinematics allows an arbitrary tilt angle to be applied (i.e. its two components: pitch and roll over the full angular range). The related geometrical relationships are presented along with the respective uncertainties resulting from their application. Metrological features of the test rig are carefully evaluated and briefly discussed. Accuracy of the test rig is expressed in terms of the respective uncertainties, as recommended by ISO; its scope of application as well as the related limitations are indicated. Even though the test rig is mostly composed of standard devices, like rotation stages and incremental angle encoder, its performance can be compared with specialized certified machines that are very expensive. Exemplary results of experimental studies of MEMS accelerometers realized by means of the test rig are presented and briefly discussed. Few ways of improving performance of the test rig are proposed.

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Section: Geometrical Relationshipsmentioning

confidence: 97%

Section: Experimental Studiesmentioning

confidence: 99%

Dual-Axis Test Rig for Mems Tilt Sensors

Łuczak¹

2014

Metrology and Measurement Systems

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“…While they were used in the beginning mainly as sensors and actuators, they are nowadays designed to be used in many other engineering applications [1]. To cite few, they are being used as pressure sensors [2,3], accelerometers [4,5], microphones in cellphones [6], micro-mirrors in plasma TVs [7], GPS [8] and many other useful applications. Moreover, they are still being continuously explored by scientists and researchers, and these developments will hopefully lead to more useful features and become even more important in life.…”

Section: Introductionmentioning

confidence: 99%

Structural Behavior of a Multi-Layer Based Microbeam Actuator

2016

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Abstract:In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed of two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model is considered along with the nonlinear electric actuating force to get the equation of motion governing the structural behavior of the actuator. A reduced-order modeling (ROM) based on the Galerkin expansion technique, while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions, is assumed as a discretization technique of the equations of motion in this investigation. The results showed that the double-microbeam MEMS actuator configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.

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“…Their utilization is oriented towards detection of defects on the inner pipe surface, the repair of localized defects, monitoring and maintenance of pipes and last, but not least, their utilization is oriented towards drawing new cables through old and unused pipe systems [8]. The utilization of motion principles by means of classic wheel and crawling traction for design of in-pipe minimachine is limited by a small pipe inner diameter [7].…”

Section: Introductionmentioning

confidence: 99%

In-pipe Minimachine and Principles of its Motion and Control

Ivančo¹,

Dovica²,

Gorzás³

2010

AMS

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The paper deals with the minimachine designed to move within the pipes with inner diameter less than 25 mm. The minimachine consists of two modules connected by a link of variable length enabling to change their mutual distance. Motion is based on inchworm principle known from biology. In motion sequence one of the modules is anchored to the inner surface of the pipe, while the second is released and moved forward by change of the link length. The principle of the link length change consists in transformation of the actuator rotary movement to the linear motion. Problem of anchoring the modules by flexible metal bristles is analyzed in the paper. INTRODUCTIONNowadays the mobile machines for motion within pipes represent a promising area of Vladimír IVANČO (SK)

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Sensing Tilt With MEMS Accelerometers

Cited by 125 publications

References 8 publications

Dual-Axis Test Rig for Mems Tilt Sensors

Dual-Axis Test Rig for Mems Tilt Sensors

Structural Behavior of a Multi-Layer Based Microbeam Actuator

In-pipe Minimachine and Principles of its Motion and Control

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