2017 Spanish Conference on Electron Devices (CDE) 2017
DOI: 10.1109/cde.2017.7905211
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Sensing properties of ZnO nanostructured layers

Lluis M. Guia
1
,
Pedro J. Rodríguez-Cantó2,
V. Muñoz‐Sanjosé
3
et al.

Abstract: Nanostructured ZnO layers have been deposited onto SiO 2 /Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.

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