Sense of touch in submicron region realized by two-axis tactile sensor with a needle-like contactor

Nakashima, Tsubasa; Watatani, Kazuki; Terao, Kyohei; Shimokawa, Fusao; Takao, Hidekuni

doi:10.1109/memsys.2018.8346694

Cited by 2 publications

(1 citation statement)

References 5 publications

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“…To obtain fine sensation like human fingertip, it is required to aim a sensor reproducing functions of fingertip skin sensation. High resolution two-axis MEMS tactile sensors with 100µm-spatial resolution and 50µN-sensitivity have been reported by our group (6,7) . Although their sensitivity and spatial resolution are comparable to fingertip skin, they have only single contactor, and "multiple point detection" like fingertip skin surface has not been realized.…”

Section: Silicon Mems Nano-tactile Sensor Based On Post-cmos Compatib...mentioning

confidence: 99%

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

Takao

2020

ECS Trans.

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Based on silicon post-CMOS compatible process, we have realized high performance silicon MEMS tactile sensor called “Nano-tactile sensor”, which is comparable to the performance of fingertip sense of touch. In this tactile sensor device, all the mechanical structures are made from single crystalline silicon which is the active layer of SOI wafers. No elastomer/polymer structures are used in the mechanical sensing structure, and softness and elasticity necessary to tactile sensing are realized by silicon micro mechanical structures. In the latest version of our tactile sensors, six contactors with fingerprint-like shape are integrated at a pitch of 500µm to get high spatial resolution tactile images. Each fingerprint-like contactor reproduces vertical motion (by micro roughness) and horizontal motion (by frictional force) of a fingerprint closely under sweeping motion of fingertip in measurement. The performances are enough high to analyze surface touch feelings of “Hair surface condition”, “Skin condition”, and “Touch feeling of various papers and clothes” like human fingertip. Combination of high-resolution tactile sensor and deep neural network is a strong approach to reproduce human fingertip sensation by state-of-the-art device electron device technology.

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Section: Silicon Mems Nano-tactile Sensor Based On Post-cmos Compatib...mentioning

confidence: 99%

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

Takao

2020

ECS Trans.

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A 0.1µM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure

Nakashima

Watatani

Terao

et al. 2019

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am

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Sense of touch in submicron region realized by two-axis tactile sensor with a needle-like contactor

Cited by 2 publications

References 5 publications

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

(Invited) Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials

A 0.1µM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure

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