2003
DOI: 10.1016/s0167-9317(03)00139-4
|View full text |Cite
|
Sign up to set email alerts
|

Semiconductor micro- and nanoneedles for microinjections and ink-jet printing

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
36
0

Year Published

2005
2005
2022
2022

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 59 publications
(36 citation statements)
references
References 11 publications
0
36
0
Order By: Relevance
“…Fabrication of a rich variety of complex shells and assembling them in configurations appropriate for various device applications [6,12,13,17] have become possible with the advent of methods using directional rolling of films [8,9,12]. For the first time in [1, 2, 9], we proved it possible to form micro-and nanohelices.…”
Section: Original Papermentioning
confidence: 99%
See 2 more Smart Citations
“…Fabrication of a rich variety of complex shells and assembling them in configurations appropriate for various device applications [6,12,13,17] have become possible with the advent of methods using directional rolling of films [8,9,12]. For the first time in [1, 2, 9], we proved it possible to form micro-and nanohelices.…”
Section: Original Papermentioning
confidence: 99%
“…The cornerstone stages in the development of this fabrication technology enabling precise formation of variously shaped shells from semiconductor and metal nano-objects include: (1) using highly selective etchants for the removal of sacrificial layers [1,2,16,18], (2) directional film rolling yielding threedimensional micro-and nanoshells of various shapes [8,9,12], (3) assembly of micro-and nanoshells in more complex architectures [3,4], (4) supercritical drying of nanoshells [11,14], (5) formation of nanoshells precisely controlled in all three dimensions [10], (6) elimination of surface oxidation in ultrathin layers, and (7) overgrowing or filling of shells [2].…”
Section: Original Papermentioning
confidence: 99%
See 1 more Smart Citation
“…Such tubes can be used for the development of nanojet printers [59]. In our experiment, a solution contained in a microtube was locally heated by a resistive microheater prepared from Ni foil.…”
Section: Elements For Micro-and Nanofluidic Mems/nemsmentioning
confidence: 99%
“…In a multilayer structure the bottom film acts as sacrificial layer and is selectively etched. 14 In the case of polymeric materials, the bottom film exhibits a selective swelling response that also induces mechanical stress. 4 Multilayer configurations are employed for inducing self-scrolling even for organic polymers, in general via selective swelling 15 or thermal expansion mismatch.…”
Section: Introductionmentioning
confidence: 99%