Self-referenced silicon nitride array microring biosensor for toxin detection using glycans at visible wavelength

Ghasemi, Farshid; Eftekhar, Ali A.; Gottfried, David; Song, Xuezheng; Cummings, Richard D.; Adibi, Ali

doi:10.1117/12.2005653

Cited by 14 publications

(7 citation statements)

References 39 publications

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“…Integrated photonic resonators are sensitive, on-chip transducers suitable for various sensing applications (Hunt and Armani, 2010;Fan et al, 2008). Their miniature size allows the realization of large microarray sensors on a single chip that is of interest in many biosensing applications such as the detection of DNA (Rong et al, 2008), microRNA (Qavi and Bailey, 2010), toxins (Ghasemi et al, 2013), blood biomarkers (Washburn et al, 2009), and aptamers (Park et al, 2013). The resonance wavelength of a typical resonance-based integrated photonic sensor changes when the desired analyte binds to its surface, resulting in a change in the transmitted power through an optical waveguide that is coupled to the resonator.…”

Section: Introductionmentioning

confidence: 99%

Multiplexed detection of lectins using integrated glycan-coated microring resonators

Ghasemi

Hosseini

Song

et al. 2016

Biosensors and Bioelectronics

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We present the systematic design, fabrication, and characterization of a multiplexed label-free lab-on-a-chip biosensor using silicon nitride (SiN) microring resonators. Sensor design is addressed through a systematic approach that enables optimizing the sensor according to the specific noise characteristics of the setup. We find that an optimal 6 dB undercoupled resonator consumes 40% less power in our platform to achieve the same limit-of-detection as the conventional designs using critically coupled resonators that have the maximum light-matter interaction. We lay out an optimization framework that enables the generalization of our method for any type of optical resonator and noise characteristics. The device is fabricated using a CMOS-compatible process, and an efficient swabbing lift-off technique is introduced for the deposition of the protective oxide layer. This technique increases the lift-off quality and yield compared to common lift-off methods based on agitation. The complete sensor system, including microfluidic flow cell and surface functionalization with glycan receptors, is tested for the multiplexed detection of Aleuria Aurantia Lectin (AAL) and Sambucus Nigra Lectin (SNA). Further analysis shows that the sensor limit of detection is 2 × 10(-6) RIU for bulk refractive index, 1 pg/mm(2) for surface-adsorbed mass, and ∼ 10 pM for the glycan/lectins studied here.

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Section: Introductionmentioning

confidence: 99%

Multiplexed detection of lectins using integrated glycan-coated microring resonators

Ghasemi

Hosseini

Song

et al. 2016

Biosensors and Bioelectronics

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“…SiN MRRs sensors operate over a wide wavelength range [23] and also can be moderately tuned by using integrated microheater elements [7], i.e. , the Vernier peak can be centered at any required SiN MRRs wavelength.…”

Section: Resultsmentioning

confidence: 99%

“…We conclude by proposing cascaded SiN MRRs as sensor structures equal to SOI MRRs for sensitive biochemical sensing, due to their overall performance in real-time monitoring and sensitivity, e.g., for alcohol and aqueous solutions. SiN MRRs sensors operate over a wide wavelength range [ 23 ] and also can be moderately tuned by using integrated microheater elements [ 7 ], i.e. , the Vernier peak can be centered at any required SiN MRRs wavelength.…”

Section: Resultsmentioning

confidence: 99%

A Highly Sensitive Refractometric Sensor Based on Cascaded SiN Microring Resonators

Zamora

Lützow

Weiland

et al. 2013

Sensors

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We investigate a highly sensitive optical sensor based on two cascaded microring resonators exploiting the Vernier effect. The architecture consists of two microrings with a slight difference in their free spectral ranges. This allows the generation of the Vernier effect for achieving ultra-high sensitivities. The sensor chip was fabricated using a silicon nitride platform and characterized with isopropanol/ethanol mixtures. A sensitivity of 0.95 nm/% was found for isopropanol concentrations in ethanol ranging from 0% to 10%. Furthermore, a collection of measurements was carried out using aqueous sodium chloride (NaCl) in solutions of different concentrations, confirming a high sensitivity of 10.3 nm/% and a bulk refractive index sensitivity of 6,317 nm/RIU. A limit of detection of 3.16 × 10−6 RIU was determined. These preliminary results show the potential features of cascaded silicon nitride microring resonators for real-time and free-label monitoring of biomolecules for a broad range of applications.

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“…All of the work including this work have attained a detection limit of 10 −7~1 0 −4 RIU. Two of the microcavity-based sensors (Ghasemi et al, 2013;Doolin et al, 2015) and three of the MZI-based sensors (Duval et al, 2013;Misiakos et al, 2014;Dante et al, 2015) operate on the SiN-based platform in the visible wavelengths.…”

Section: Discussionmentioning

confidence: 99%

“…Most of the reported microcavity-based sensors in the literature (except Ghasemi et al, 2013;Doolin et al, 2015) operate in the telecommunication wavelengths (1.3/1.55 µm) and require a wavelength-tunable laser and a non-silicon photodetector. Whereas, our CROW sensor operating in the visible wavelengths only requires in principle a fixed-wavelength visible laser diode and a silicon CCD/CMOS camera after the library preparation.…”

Section: Discussionmentioning

confidence: 99%

Silicon-Nitride-Based Integrated Optofluidic Biochemical Sensors Using a Coupled-Resonator Optical Waveguide

2015

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Citation:Wang J, Yao Z and Poon AW (2015) Silicon-nitride-based integrated optofluidic biochemical sensors using a coupled-resonator optical waveguide. Front. Mater. 2:34. doi: 10.3389/fmats.2015.00034 Silicon-nitride-based integrated optofluidic biochemical sensors using a coupled-resonator optical waveguide Silicon nitride (SiN) is a promising material platform for integrating photonic components and microfluidic channels on a chip for label-free, optical biochemical sensing applications in the visible to near-infrared wavelengths. The chip-scale SiN-based optofluidic sensors can be compact due to a relatively high refractive index contrast between SiN and the fluidic medium, and low-cost due to the complementary metal-oxide-semiconductor (CMOS)-compatible fabrication process. Here, we demonstrate SiN-based integrated optofluidic biochemical sensors using a coupled-resonator optical waveguide (CROW) in the visible wavelengths. The working principle is based on imaging in the far field the outof-plane elastic-light-scattering patterns of the CROW sensor at a fixed probe wavelength. We correlate the imaged pattern with reference patterns at the CROW eigenstates. Our sensing algorithm maps the correlation coefficients of the imaged pattern with a library of calibrated correlation coefficients to extract a minute change in the cladding refractive index. Given a calibrated CROW, our sensing mechanism in the spatial domain only requires a fixed-wavelength laser in the visible wavelengths as a light source, with the probe wavelength located within the CROW transmission band, and a silicon digital charge-coupled device/CMOS camera for recording the light scattering patterns. This is in sharp contrast with the conventional optical microcavity-based sensing methods that impose a strict requirement of spectral alignment with a high-quality cavity resonance using a wavelength-tunable laser. Our experimental results using a SiN CROW sensor with eight coupled microrings in the 680 nm wavelength reveal a cladding refractive index change of~1.3 × 10 −4 refractive index unit (RIU), with an average sensitivity of 281 ± 271 RIU −1 and a noise-equivalent detection limit of 1.8 × 10 −8~1 .0 × 10 −4 RIU across the CROW bandwidth of~1 nm.

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Self-referenced silicon nitride array microring biosensor for toxin detection using glycans at visible wavelength

Cited by 14 publications

References 39 publications

Multiplexed detection of lectins using integrated glycan-coated microring resonators

Multiplexed detection of lectins using integrated glycan-coated microring resonators

A Highly Sensitive Refractometric Sensor Based on Cascaded SiN Microring Resonators

Silicon-Nitride-Based Integrated Optofluidic Biochemical Sensors Using a Coupled-Resonator Optical Waveguide

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