Self-organized 2D periodic arrays of nanostructures in silicon by nanosecond laser irradiation

Abstract

We report a phenomenon of spontaneous formation of self-organized 2D periodic arrays of nanostructures (protrusions) by directly exposing a silicon surface to multiple nanosecond laser pulses. These self-organized 2D periodic nanostructures are produced toward the edge as an annular region around the circular laser spot. The heights of these nanostructures are around 500 nm with tip diameter ~100 nm. The period of the nanostructures is about 1064 nm, the wavelength of the incident radiation. In the central region of the laser spot, nanostructures are destroyed because of the higher laser intensity (due to the Gaussian shape of the laser beam) and accumulation of large number of laser pulses. Optical diffraction from these nanostructures indicates a threefold symmetry, which is in accordance with the observed morphological symmetries of these nanostructures.

Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement

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“…In recent decades, monolayers of particles with sizes that are comparable to the wavelength of optical radiation have been actively studied, because they have great potential for use in optics, photonics, optoand microelectronics, and many other areas. They are used in research, development, and creation of solar cells, LEDs, photonic crystals, synthetic opals, antireflection coatings, transmission and reflection filters, diffuse scatterers, detectors, resonators, and lasers [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15].…”

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