Self-calibration phase-shifting algorithm with interferograms containing very few fringes based on Fourier domain estimation

Wang, Yi; Liu, Xiaoxu; Liu, Yicheng; Tian, Jing; Zhong, Liu

doi:10.1364/oe.25.029971

Cited by 12 publications

(9 citation statements)

References 29 publications

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“…Recently, Wang et al [189] presented a novel selfcalibration PSA called mid-band spatial spectrum matching (MSSM) to achieve phase retrieval from ultra-sparse fringe patterns (USFP). Figure 9 shows the measurement results using different algorithms.…”

Section: Self-calibration Algorithmsmentioning

confidence: 99%

“…The measurement accuracy of an optical interferometer fundamentally depends on the demodulation process of the underlying fringe phase information. Even though the PSAs are considered mathematically convenient and deterministic in the phase demodulation procedure, the error caused by the incorrect estimation of phase shifts is an inescapable problem [189,196]. PSAs adopt more than one phase-shifted fringe patterns (normally at least three) to retrieve the phase information, providing the advantages of high resolution and accuracy in phase measurement.…”

Section: Miscalibration Errormentioning

confidence: 99%

“…USFP: Ultra-sparse fringe pattern; MSSM: Mid-band spatial spectrum matching; PCA: Principal component analysis; AIA: Advanced iterative algorithm. Adapted with permission from Ref [189]…”

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confidence: 99%

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Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

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Section: Self-calibration Algorithmsmentioning

confidence: 99%

Section: Miscalibration Errormentioning

confidence: 99%

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Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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“…In addition, some multi-step phase shifting methods which are not limited by the number of fringes under arbitrary phase shifts are proposed [23][24][25]. Xu's histogram method does not need the number of interference fringes [23], but it requires that the phase shifts be evenly distributed over a complete period to eliminate the influence of background and modulation.…”

Section: Introductionmentioning

confidence: 99%

A high-accuracy phase shifting retrieval approach based on phase shifts search

Zhang

Han-lin

et al. 2020

J. Opt.

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To achieve high measurement accuracy without the restriction of fringe number, a high-accuracy phase shifting retrieval approach based on phase shifts search (PSS) is proposed. Firstly, by setting the search conditions related to the phase shifts and using the PSS method to obtain the phase shifts between the phase shifting interferograms, subsequently, the phase distribution of the sample can be accurately obtained by using the obtained phase shifts. To our knowledge, the proposed method has the highest accuracy among the multi-step arbitrary phase shifting algorithms, and it is not limited to the number of fringes and the distribution of phase shifts between the interferograms. In the case of sparse fringes, the phase can still be retrieved with high accuracy, which proves that the proposed method is a high accuracy method with fewer constraints and wider applications. The feasibility and superiority of this method are proved by the simulation analysis and experiment.

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“…Temporal PSI can fully use the space-bandwidth product of image detector while the spatial PSI can realize single-shot measurement. In temporal PSI, the requirement of many phase shift interferograms makes it sensitive to the environmental vibration [13], [14], and the accuracy of self-calibration algorithm plays an important role in accurate phase retrieval due to the uncertainty of phase shift [15]- [19]. Recently, although some good solutions are proposed, the accuracy of self-calibration algorithm is greatly related to the fringe's number.…”

Section: Introductionmentioning

confidence: 99%

Two-Step Phase-Shifting Algorithm Based on the Quadratic Spatial Filtering of Interferograms

et al. 2020

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By using the quadratic spatial filtering (QSF) operation of interferograms, we propose a fast and accurate phase retrieval algorithm in 2-step phase-shifting interferometry (PSI), in which both the interference signal separation and blind phase shift estimation can be realized. Compared with the existed 2-step PSI algorithms, the proposed QSF algorithm reveals two advantages: First, when the background intensity is not accurately estimated, which is a serious problem in 2-step PSI, the distortion of the retrieved phase can be released. Second, there is no requirement about the fringe density of interference pattern, reflecting the phase shift estimation can be realized even if the fringes density is sparse. The former is a valuable solution to reduce most significant errors in 2-step PSI, and the latter makes the accuracy robust against different fringe patterns. Both the simulation and experimental results demonstrate the excellent performance of the proposed QSF algorithm.

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Self-calibration phase-shifting algorithm with interferograms containing very few fringes based on Fourier domain estimation

Cited by 12 publications

References 29 publications

Development of surface reconstruction algorithms for optical interferometric measurement

Development of surface reconstruction algorithms for optical interferometric measurement

A high-accuracy phase shifting retrieval approach based on phase shifts search

Two-Step Phase-Shifting Algorithm Based on the Quadratic Spatial Filtering of Interferograms

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