2005
DOI: 10.1063/1.1929069
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Self-assembled growth and enhanced blue emission of SiOxNy-capped silicon nanowire arrays

Abstract: Unique structured SiOxNy-capped Si nanowire arrays were fabricated via electroless metal deposition on α-SiOxNy-covered Si wafer in ionic silver HF solution through selective chemical etching. A self-assembled localized microscopic electrochemical cell model and a diffusion-limited aggregation process are associated with the formation of the SiOxNy-capped Si nanowire arrays. An enhanced blue photoluminescence band has been recorded. Emission and excitation spectral analyses suggest that generation of photoexci… Show more

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Cited by 23 publications
(14 citation statements)
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“…In our previous work, silver capped Si nanowires were found when etching the Si wafer continuously using aforementioned electroless metal deposition method [18][19][20]. This is consistent with galvanic displacement proceeding, because the oxidation and dissolution of the silicon substrate occur selectively and continuously beneath the metal deposits.…”
Section: Resultssupporting
confidence: 71%
“…In our previous work, silver capped Si nanowires were found when etching the Si wafer continuously using aforementioned electroless metal deposition method [18][19][20]. This is consistent with galvanic displacement proceeding, because the oxidation and dissolution of the silicon substrate occur selectively and continuously beneath the metal deposits.…”
Section: Resultssupporting
confidence: 71%
“…However, most of the silicon oxynitride materials studied up to now have a nitrogen concentration less than 15 at.% [8,9], and primarily are amorphous SiO x N y films. As a result, the properties of silicon oxynitride materials with high N concentration remain largely unexplored [10].…”
Section: Introductionmentioning
confidence: 99%
“…However, reports on Si-O-N nanowires were so far rather rare [ 12 - 16 ]. The reported synthesis processes often involved the utilization of transition metals as catalysts in quartz tube furnace for pyrolysis, and sometimes inductively coupled coil was applied to obtain NH 3 plasma for the nanowire growth [ 12 - 15 ].…”
Section: Introductionmentioning
confidence: 99%
“…These methods are unfavorable due to either the metal contamination to the resulted nanowires or the complicated equipment. Up to now, the optical properties of the Si-O-N nanowires remain largely unexplored, with only blue photoluminescence property recorded in literature [ 13 , 16 ]. In this letter, we develop an inexpensive, easy, repeatable, and catalyst-free method to obtain a kind of amorphous Si-O-N nanowire showing high optical reflectivity in visible-light wavelength, and investigate its growth mechanism.…”
Section: Introductionmentioning
confidence: 99%