2008
DOI: 10.1016/j.matlet.2007.09.029
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Self-annealing of electrodeposited copper thin film during room temperature storage

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Cited by 9 publications
(3 citation statements)
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“…It seems that the Cu-10 sample has smooth and compact morphology surfaces than the other samples-the higher current density resulting in a high crystal nucleation rate that leads to a fine-grain structure. The fine-grained structure leads to a tremendous large amount of grain boundary, resulting in higher resistivity and rigidity [18]. A similar morphology is found in the other's research and it has been plated copper onto aluminum with current density1 A/dm².…”
Section: Experimental Methodssupporting
confidence: 67%
“…It seems that the Cu-10 sample has smooth and compact morphology surfaces than the other samples-the higher current density resulting in a high crystal nucleation rate that leads to a fine-grain structure. The fine-grained structure leads to a tremendous large amount of grain boundary, resulting in higher resistivity and rigidity [18]. A similar morphology is found in the other's research and it has been plated copper onto aluminum with current density1 A/dm².…”
Section: Experimental Methodssupporting
confidence: 67%
“…The microhardness values of fine crystals are higher than those of coarse crystals because of more grain boundaries [27]. Therefore, the microhardness gradient of the electroformed copper is achieved due to the variation of microstructure.…”
Section: Microhardnessmentioning
confidence: 99%
“…Recrystallization and grain growth occur at room temperature during a self-annealing phenomenon, unlike the conventional annealing process at high temperatures between 600 °C and 1000 °C (Blaz et al, 1983;Huang et al, 1997;Seah et al, 1999;Hau-Riege and Thompson, 2000;Koo and Yoon, 2001;Militzer et al, 2004;Hasegawa et al, 2006;Stangl et al, 2008). The drastic change in electrical, mechanical, and crystallographic properties was accompanied by a self-annealing phenomenon (Ritzdorf et al, 1998;Brongersma et al, 1999;Ueno et al, 1999;Lagrange et al, 2000;Hara et al, 2003;Dong et al, 2008;Cheng et al, 2010;Huang et al, 2010). Ho et al conducted an in situ investigation of the selfannealing behavior of electroplated copper films with organic additives.…”
Section: Introductionmentioning
confidence: 99%