“…Recrystallization and grain growth occur at room temperature during a self-annealing phenomenon, unlike the conventional annealing process at high temperatures between 600 °C and 1000 °C (Blaz et al, 1983;Huang et al, 1997;Seah et al, 1999;Hau-Riege and Thompson, 2000;Koo and Yoon, 2001;Militzer et al, 2004;Hasegawa et al, 2006;Stangl et al, 2008). The drastic change in electrical, mechanical, and crystallographic properties was accompanied by a self-annealing phenomenon (Ritzdorf et al, 1998;Brongersma et al, 1999;Ueno et al, 1999;Lagrange et al, 2000;Hara et al, 2003;Dong et al, 2008;Cheng et al, 2010;Huang et al, 2010). Ho et al conducted an in situ investigation of the selfannealing behavior of electroplated copper films with organic additives.…”