Self-aligned micromachining process for large-scale, free-space optical cross-connects

Hélin, Philippe; Mita, Makoto; Bourouina, Tarik; Reyne, Gilbert; Fujita, Hiroyuki

doi:10.1109/50.908730

Cited by 29 publications

(22 citation statements)

References 14 publications

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“…Data was collected on 24 8 8 switches by cycling each mirror on-off 50 times, and recording the resulting angle after each switching event. Histograms of this data are presented in Fig.…”

Section: Resultsmentioning

confidence: 99%

“…The first is to use an etched vertical surface as the mirror element [7], [8], and the other is to fabricate an array of horizontal mirrors that are later actuated or assembled into the vertical position. The challenge of using an etched vertical mirror surface is that it is difficult to achieve low surface roughness with this method, and it is challenging to deposit and lithographically pattern a reflective gold coating on the vertical mirror array.…”

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confidence: 99%

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Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch

Horsley

Davis²,

Hogan³

et al. 2005

J. Microelectromech. Syst.

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A novel magnetically actuated 8 8-port MEMSbased fiber-optic switch is described. Fiber-to-fiber insertion loss measurements of six 8 8 switch units show average and worst-case insertion loss of 1.3 dB and 2 dB, respectively. Low insertion loss is achieved through a unique MEMS design that uses anisotropically etched single-crystal silicon sidewalls to provide a global mechanical alignment stop for an array of MEMS mirrors. This alignment surface produces a uniform and repeatable mirror angle across the mirror array. Mirror misalignment is attributed to the surface roughness of the silicon sidewalls. Repeated interferometric measurements of the mirrors of 24 8 8 switch units show repeatability of the mirror angle of 3 10 3 degrees, while the uniformity of the mirror angle across the MEMS array is2 10 2 degrees, in agreement with the angular error predicted from measurements of sidewall surface roughness. In turn, the average repeatability and uniformity of the insertion loss are 0.01 dB and 1 dB, respectively, in agreement with predictions based on the interferometric measurements. Finally, the unique dynamics of the magnetic actuation and electrostatic addressing scheme are described. Measurements show that fast switching can be achieved by driving the mirrors with a magnetic pulse that is faster than the mechanical resonant frequency of the mirror, relying on an electrostatic clamping force to capture the mirror as it overshoots the magnetic field angle. This actuation scheme is shown to result in switching times of 8.5 ms to 13.5 ms, but requires accurate control of the kinetic energy of the mirror.[1169]Index Terms-Microelectromechanical devices, optical fiber devices, optical switches.

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“…Data was collected on 24 8 8 switches by cycling each mirror on-off 50 times, and recording the resulting angle after each switching event. Histograms of this data are presented in Fig.…”

Section: Resultsmentioning

confidence: 99%

mentioning

confidence: 99%

Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch

Horsley

Davis²,

Hogan³

et al. 2005

J. Microelectromech. Syst.

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show abstract

“…A rough surface with inferior quality metal coating results in scattering losses, which in turn results in increased insertion loss. Then, for category 2, the approach by wet anisotropic etching technique is developed to improve the surface quality of the vertical mirrors [10,11]. It has been shown that these mirrors formed by particular single crystal surface have excellent surface quality.…”

Section: Introductionmentioning

confidence: 99%

16×16 Mirror type optical switch with integrated fiber alignment and steady switching state

Chen

Wang

et al. 2008

Micro & Optical Tech Letters

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triangular projection between the slab waveguide and the PhC one, unlike structures 1-3, so that we find that the projection is necessary for obtaining better transmission characteristic. CONCLUSIONSWe applied topology optimization with the FEM to improve the coupling between a slab waveguide and a PhC waveguide and obtained an optimized structure with excellent transmission characteristic in a small design region for the coupling. Also, we simplified the optimized structure of the coupling region for easier fabrication and were able to find some core features of the optimized structure. ACKNOWLEDGMENTSThe authors thank Prof. K. Svanberg for his computer codes of MMA.

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“…The anisotropic etching method is especially interesting for manufacturing of micromirrors inclined at 45°towards the substrate. Such micromirrors, which provide 90°out-ofplane reflection, can be applied for optical switching or interconnecting (Helin et al 2000;Yang et al 2007;Hsiao et al 2009;Xu et al 2010). In the commercially available Si (100) wafer, the micromirrors' inclination of 45°t owards the bottom surface can be defined by {110} sidewall planes.…”

Section: Introductionmentioning

confidence: 99%

Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives

et al. 2013

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The fabrication of 45°micromirrors by silicon anisotropic etching in potassium hydroxide (KOH) and tetramethylammonium hydroxide (TMAH) solutions containing organic additives is investigated in this paper. The reflective planes are formed by {110} sidewall planes inclined at 45°towards the Si (100) wafer. Isopropyl alcohol and Triton X-100 surfactant are used as additives, because they are supposed to provide the etch rate ratio R(100)/R(110) [ 1, which is necessary for {110} sidewalls development. The fabricated spatial microstructures with 45°sidewalls are examined in terms of the {110} surface roughness and the quality of the {110} sidewall profile. The KOH solution saturated with the alcohol gives the striped {110} surface, though the stripes almost disappear after addition of Triton surfactant to KOH and TMAH etchants. The 45°sidewall profiles fully defined by {110} planes are obtained in KOH as well as TMAH solutions containing additives. The measurements of micromirrors' reflectivity indicate that replacement of the alcohol by Triton surfactant in the KOH solution reduces the optical power loss caused by the reflection. The achieved reflectivity is comparable with the one obtained by etching in the TMAH solution with surfactant.

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Self-aligned micromachining process for large-scale, free-space optical cross-connects

Cited by 29 publications

References 14 publications

Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch

Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch

16×16 Mirror type optical switch with integrated fiber alignment and steady switching state

Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives

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