1996
DOI: 10.1063/1.115736
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Selectivity of growth on patterned GaAs (311)A substrates

Abstract: We report on the selectivity of growth on patterned GaAs (311)A substrates by solid-source molecular beam epitaxy. For mesa stripes oriented along the [01-1] direction, the selectivity of growth is qualitatively different from that on patterned GaAs (100) substrates with a higher growth rate on one of the side facets of the stripes. This growth mode develops a convex curved surface profile enclosing thicker wirelike regions of GaAs due to preferential migration of Ga atoms from both sides toward the sidewall l… Show more

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Cited by 75 publications
(30 citation statements)
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“…15 The shallow etch depth minimizes processing induced damage for defect-free QWires and QDots. Due to the stable surface profile 16 no reshaping is required for QWire and QDot formation and stacking, allowing barrier layers of any desired thickness.…”
Section: Introductionmentioning
confidence: 99%
“…15 The shallow etch depth minimizes processing induced damage for defect-free QWires and QDots. Due to the stable surface profile 16 no reshaping is required for QWire and QDot formation and stacking, allowing barrier layers of any desired thickness.…”
Section: Introductionmentioning
confidence: 99%
“…͓S0003-6951͑00͒01148-7͔ Molecular-beam epitaxy ͑MBE͒ growth on patterned GaAs ͑311͒A substrates has been demonstrated as a promising way to fabricate high-quality low-dimensional quantum structures. 1,2 The formation of GaAs/͑Al, Ga͒As quantum wires ͑QWR͒ and quantum dots ͑QD͒ with excellent structural 3,4 and electronic properties 5,6 near the bottom of the sidewall towards ͓23 3 ͔ relies on the preferential migration of Ga atoms from the mesa top and bottom towards the sidewall, leaving behind a smooth, nonfaceted, convex profile, which is tilted by about 1°to the ͑311͒A plane. To gain deeper understanding of the unique growth behavior on patterned GaAs ͑311͒A substrates, in this letter we present a detailed study of the evolution of the growth front by crosssectional atomic force microscopy ͑XAFM͒, as well as of the surface morphology by top view AFM for a wide range of GaAs layer thickness.…”
mentioning
confidence: 99%
“…[7][8][9][10] QWR and QD formations rely on the preferential adatom migration from the mesa top and bottom towards the fast-growing sidewall in the sector towards the next ͑100͒ plane. 11 The direction of adatom migration is, thus, opposite to that on patterned ͑100͒ substrates for formation of V-groove or ridgetype QWRs which are bound by slow-growing side facets. High-quality, weakly strained InGaAs QWRs embedded in InGaAsP on shallow-patterned InP ͑311͒A substrates have been demonstrated with strong emission up to room temperature in the technologically important 1.55 m wavelength range for telecom applications.…”
Section: Introductionmentioning
confidence: 99%