Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays With On-Chip MOSFETs on Si

Kawano, Takeshi; Kato, Yoshiko; Tani, Ryosuke; Takao, Hidekuni; Sawada, Kazuaki; Ishida, M.

doi:10.1109/ted.2003.822473

Cited by 71 publications

(49 citation statements)

References 8 publications

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“…The microtube array was fabricated by using selective vapor-liquid-solid (VLS) growth and microfabrication processes. This fabrication process has an advantage, in that it is possible to integrate microtubes, microprobe electrodes, and microelectronics into one chip (Kawano et al 2004;Takei et al 2008a, b).…”

Section: Introductionmentioning

confidence: 99%

Out-of-plane microtube arrays for drug delivery—liquid flow properties and an application to the nerve block test

Takei

Kawashima

Kawano

et al. 2008

Biomed Microdevices

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We have proposed fabricating very fine out-of-plane silicon-dioxide microtube arrays using a selective vapor-liquid-solid (VLS) growth technique and microfabrication processes. In this study, we elucidated the liquid-flow properties of microtubes with different inner diameters. Our fabricated microtubes were 0.5 microm in wall thickness; 20 microm in height; and either 2.5 microm, 4.1 microm, 4.6 microm, or 6.4 microm in inner diameter. We determined the relationship between the flow pressure and the liquid flow rate through the microtube. We also conducted a nerve block test, in which a microtube with 4.6 microm inner diameter was used to administer lidocaine solution (Na channel blocker) to the rat sciatic nerve. This successful test represents the first reported use of a microtube for drug delivery to the peripheral nerve of a rat. We conclude that the proposed microtube array and its fabrication process might contribute to developing pharmacological devices.

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Section: Introductionmentioning

confidence: 99%

Out-of-plane microtube arrays for drug delivery—liquid flow properties and an application to the nerve block test

Takei

Kawashima

Kawano

et al. 2008

Biomed Microdevices

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“…For small experimental animals, invasive measurements are acceptable, and electrical measurements by inserting electrodes into the brains of untethered animals are conventionally used. Besides simple metal electrodes, several types of sophisticated Si probes have been developed (such as the Utah probe [21], the Michigan probe [22], and the Toyohashi probe [23]) to measure brain activity at multiple points. It is, however, noted that electrical measurements are nonspecific, and thus, in many experiments, optical measurement using fluorescence is required, because such measurements are specific.…”

Section: Measurement Methods For Brain Activitiesmentioning

confidence: 99%

“…23 (a,b) The measurement system of the brain activities of freely moving mouse implanted with an imaging device.…”

mentioning

confidence: 99%

Implantable CMOS Imaging Devices

Ohta

2014

Implantable Bioelectronics

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“…These devices have played an important role in understanding neural behavior and neuronal networks (Hochberg et al 2006;Kawano et al 2004;Wise et al 2004;Ludwig et al 2009;Kim et al 2009). A micro-fabricated needle electrode array was implanted as a cortical neural prosthesis into the human brain of a male patient with a transected spinal cord, enabling a computer cursor and an artificial hand to be controlled at will by this patient (Hochberg et al 2006).…”

Section: Introductionmentioning

confidence: 99%

“…Compared to classical recording methods such as metal electrodes, various out-of-plane penetrating microneedle electrode structures have been proposed to minimize invasiveness and increase spatial resolution (Hochberg et al 2006;Kawano et al 2004;Fitzsimmons et al 2007). The reported microneedle arrays have been manufactured using IClithography-based etching/dicing techniques to realize microneedle electrode arrays, including circular needles with a diameter of tens of micrometers (i.e., Utah electrode (Hochberg et al 2006)) or rectangular needles with a crosssectional area of hundreds of square micrometers (i.e., Michigan electrode (Wise et al 2004)).…”

Section: Introductionmentioning

confidence: 99%

Microtube-based electrode arrays for low invasive extracellular recording with a high signal-to-noise ratio

Takei

Kawano

Kawashima

et al. 2009

Biomed Microdevices

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We report on the development of a microtube electrode array as a neural interface device. To combine the desired properties for the neural interface device, such as low invasiveness with a small needle and a good signal-to-noise ratio in neural recordings, we applied the structure of a glass pipette electrode to each microtube electrode. The device was fabricated as sub-5-microm-diameter out-of-plane silicon dioxide microtube arrays using silicon microneedle templates, which are grown by the selective vapor-liquid-solid method. The microtubes had inner diameters of 1.9-6.4 microm and a length of 25 microm. Impedances ranged from 220 kOmega to 1.55 MOmega, which are less than those for conventional microneedles. In addition, the microtube electrodes had less signal attenuation than conventional microneedle electrodes. We confirmed that the effects of parasitic capacitances between neighboring microtubes and channels were sufficiently small using a test signal. Finally, neural responses evoked from a rat peripheral nerve were recorded in vivo using a microtube electrode to confirm that this type of electrode can be used for both electrophysiological measurements and as a neural interface device.

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Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays With On-Chip MOSFETs on Si

Cited by 71 publications

References 8 publications

Out-of-plane microtube arrays for drug delivery—liquid flow properties and an application to the nerve block test

Out-of-plane microtube arrays for drug delivery—liquid flow properties and an application to the nerve block test

Implantable CMOS Imaging Devices

Microtube-based electrode arrays for low invasive extracellular recording with a high signal-to-noise ratio

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