2020
DOI: 10.3762/bjnano.11.153
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Seebeck coefficient of silicon nanowire forests doped by thermal diffusion

Abstract: Thermoelectric generators made by large arrays of nanowires perpendicular to a silicon substrate, that is, so-called silicon nanowire forests are fabricated on large areas by an inexpensive metal-assisted etching technique. After fabrication, a thermal diffusion process is used for doping the nanowire forest with phosphorous. A suitable experimental technique has been developed for the measurement of the Seebeck coefficient under static conditions, and results are reported for different doping parameters. Thes… Show more

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Cited by 6 publications
(6 citation statements)
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“…[ 50 ] Contrary, the observed reduction is likely related to the suppression of the phonon drag contribution driven by the nanostructuration which doubtlessly affects the thermal conductivity. This effect is not expected to be as important as in the case of pure silicon [ 51–53 ] since germanium alloying already induces an important phonon suppression enhancement. However, it might still contribute to this reduction at the low‐temperature range.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…[ 50 ] Contrary, the observed reduction is likely related to the suppression of the phonon drag contribution driven by the nanostructuration which doubtlessly affects the thermal conductivity. This effect is not expected to be as important as in the case of pure silicon [ 51–53 ] since germanium alloying already induces an important phonon suppression enhancement. However, it might still contribute to this reduction at the low‐temperature range.…”
Section: Resultsmentioning
confidence: 99%
“…Because at the scales of the studied NW (Φ NW ≈ 87 nm) no alteration of the electronic structure is expected -typically happening for Φ NW < 10 nm -size effects can be discarded as responsible for the observed reduced S. [50] Contrary, the observed reduction is likely related to the suppression of the phonon drag contribution driven by the nanostructuration which doubtlessly affects the thermal conductivity. This effect is not expected to be as important as in the case of pure silicon [51][52][53] since germanium alloying already induces an important phonon suppression enhancement. However, it might still contribute to this reduction at the low-temperature range.…”
Section: Thermoelectrical Propertiesmentioning
confidence: 98%
“…To this end, cheap (and hence lithography-free) and reliable nanostructuring processes are needed. We developed Si-based thermoelectric generators made of large collections of vertical silicon nanowires: more than 10 7 nanowires, narrower than 80 nm and taller several hundred of micrometers, can be simultaneously fabricated by a Metal Assisted Etching process (MACE) [178][179][180], see figure 14: it consists in soaking a silicon substrate (wafer) in a diluted solution of HF and Silver Nitrate. Electrical and thermal contact can be fabricated by copper electrodeposition [179].…”
Section: Advances In Science and Technology To Meet Challengesmentioning
confidence: 99%
“…The first issue is related with the doping of the nanowires, because the MACE process is reliable only on slightly doped silicon substrates [ 80 , 81 ], with doping concentrations very low with respect to those for optimal thermoelectric properties. However, a thermal diffusion doping step can be performed after the nanowire fabrication [ 82 , 83 , 84 ]. The second issue is the fabrication of contacts for the electrical and thermal transport.…”
Section: Techniques For All-silicon Thermoelectric Devicesmentioning
confidence: 99%