Seamless integration of CMOS and microfluidics using flip chip bonding

Welch, David; Christen, Jennifer Blain

doi:10.1088/0960-1317/23/3/035009

Cited by 50 publications

(41 citation statements)

References 17 publications

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“…The use of soft lithography enabled micrometer-scale fluid channels to be incorporated onto the IC’s surface, as opposed to a millimeter-scale “bath-tub” channels used in previous studies. 4,21 These lithographically defined channels allow the position of cells to be controlled with high accuracy and for them to be brought into close proximity to sensors for highly sensitive measurement. The combination of soft lithography with laser micromachining, allowed these millimeter-sized PDMS pieces to be connected to one another with fluid channels and to be supplied with fluid connections to the outside world.…”

Section: Discussionmentioning

confidence: 99%

A multi-scale PDMS fabrication strategy to bridge the size mismatch between integrated circuits and microfluidics

Muluneh

Issadore

2014

Lab Chip

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In recent years there has been great progress harnessing the small-feature size and programmability of integrated circuits (ICs) for biological applications, by building microfluidics directly on top of ICs. However, a major hurdle to the further development of this technology is the inherent size-mismatch between ICs (~mm) and microfluidic chips (~cm). Increasing the area of the ICs to match the size of the microfluidic chip, as has often been done in previous studies, leads to a waste of valuable space on the IC and an increase in fabrication cost (>100×). To address this challenge, we have developed a three dimensional PDMS chip that can straddle multiple length scales of hybrid IC/microfluidic chips. This approach allows millimeter-scale ICs, with no post-processing, to be integrated into a centimeter-sized PDMS chip. To fabricate this PDMS chip we use a combination of soft-lithography and laser micromachining. Soft lithography was used to define micrometer-scale fluid channels directly on the surface of the IC, allowing fluid to be controlled with high accuracy and brought into close proximity to sensors for highly sensitive measurements. Laser micromachining was used to create ~50 μm vias to connect these molded PDMS channels to a larger PDMS chip, which can connect multiple ICs and house fluid connections to the outside world. To demonstrate the utility of this approach, we built and demonstrated an in-flow magnetic cytometer that consisted of a 5 × 5 cm2 microfluidic chip that incorporated a commercial 565 × 1145 μm2 IC with a GMR sensing circuit. We additionally demonstrated the modularity of this approach by building a chip that incorporated two of these GMR chips connected in series.

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Section: Discussionmentioning

confidence: 99%

A multi-scale PDMS fabrication strategy to bridge the size mismatch between integrated circuits and microfluidics

Muluneh

Issadore

2014

Lab Chip

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“…The ISFET used for measuring the cell culture demonstrates a drift which is shown in the figure 1c. Cell growth requires precise control over the pH [6], and threshold voltage shifts might cause errors in the measurements. To mitigate this drift, it was shown that cycling the vertical electric field resets the threshold voltage drift [11].…”

Section: Drift and Pulse Width Modulation Circuitmentioning

confidence: 99%

“…Their commercial use has been limited due to the fact that they have an intrinsic threshold voltage drift [5] and challenges in packaging [6]. There has been substantial research to investigate the cause of the drift [7] [8] [9], but some of the factors causing the drift have not been fully understood.…”

Section: Introductionmentioning

confidence: 99%

An on-chip system to monitor the pH of cell culture media

Shah

Arafa

Christen

2014

2014 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society

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We presents an ion sensitive field effect transistor to measure the pH of the cell culture media of human mammary adenocarcinoma (SKBR3). We use a drift mitigation technique that cycles the transistor to reset the drift in the system. We use to technique in the system to demonstrate an integrated system to monitor the pH continuously. As a part of the system a pulse width modulation circuit is designed in a 0.5 μm CMOS process which cycles the vertical electric field of the ion sensitive field effect transistor to reset the threshold voltage drift. We demonstrate the viability of a complete integrated system implementing our drift mitigation technique to monitor cultured cells. The integration is important in this application to allow for autonomous operation inside an incubator during cell culture.

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“…Also, CMOS technology leads to a totally electronic integrated lab-on-a-chip utilizing a homogenous technology [8,9]. CMOS is an innovation used in building integrated circuits.…”

Section: Introductionmentioning

confidence: 99%

CMOS Circuits and Systems for Lab‐on‐a‐Chip Applications

Ghallab¹,

Ismail²

2016

Lab-on-a-Chip Fabrication and Application

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Complementary metal oxide semiconductor (CMOS) technology allows the functional integration of sensors, signal conditioning, processing circuits and development of fully electronic integrated lab-on-a-chip. On the other hand, lab-on-a-chip is a technology which changed the traditional way by which biological samples are inspected and tested in laboratories. A lab-on-a-chip consists of four main parts: sensing, actuation, readout circuit and microfluidic chamber. Lab-on-a-chip gives the promise of many advantages including better and improved performance, reliability, portability and cost reduction. This chapter reviews the currently used lab-on-a-chips based on CMOS technology. Also, this chapter presents and discusses the features of the existing CMOS based lab-on-a-chips and their applications at the cell level.

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Seamless integration of CMOS and microfluidics using flip chip bonding

Cited by 50 publications

References 17 publications

A multi-scale PDMS fabrication strategy to bridge the size mismatch between integrated circuits and microfluidics

A multi-scale PDMS fabrication strategy to bridge the size mismatch between integrated circuits and microfluidics

An on-chip system to monitor the pH of cell culture media

CMOS Circuits and Systems for Lab‐on‐a‐Chip Applications

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