25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) 2014
DOI: 10.1109/asmc.2014.6847002
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Screen printed flexible pressure sensors skin

Abstract: This paper presents all screen printed flexible pressure sensors arrays with Polyvinylidene FluorideTrifluoroethylene P(VDF-TrFE) sandwiched between patterned metal layers. Whilst bottom electrodes and P(VDF-TrFE) are printed on a 25 µm thick polyamide (PI) substrate, the top electrodes with force concentrator posts on backside are printed on a separate polyethylene terephthalate (PET) substrate and the two are then adhered with good alignment. Each sensor module consists of 4×4 sensors array, with each sensor… Show more

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Cited by 31 publications
(19 citation statements)
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“…The low cost and ease of processing the polymer (compared with ceramics) have also led to its wide use as a piezoelectric material. The PVDF or its copolymers have been used in a large number of tactile sensing schemes (27)(28)(29)(30)(31)(32)(33)(34)(35)(36)(39)(40)(41)(42)(43)(44)(45). A detailed description of the piezoelectric effect is given in the following sections.…”
Section: Piezoelectric Materialsmentioning
confidence: 99%
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“…The low cost and ease of processing the polymer (compared with ceramics) have also led to its wide use as a piezoelectric material. The PVDF or its copolymers have been used in a large number of tactile sensing schemes (27)(28)(29)(30)(31)(32)(33)(34)(35)(36)(39)(40)(41)(42)(43)(44)(45). A detailed description of the piezoelectric effect is given in the following sections.…”
Section: Piezoelectric Materialsmentioning
confidence: 99%
“…More recent examples of piezoelectric tactile sensors include screen-printed flexible pressure sensor arrays (41,62,63). This flexible or conformable pressure sensors array consists of P(VDF-TrFE) sandwiched between patterned metal layers.…”
Section: Other Examplesmentioning
confidence: 99%
“…However the sensors have low sensitivity. A screen printed pressure sensor array with poly (vinylidene fluoride-trifluoroethylene) P(VDF-TrFE) sandwiched between patterned metal layers was demonstrated in [29], but P(VDF-TrFE) is too expensive to be used in low cost applications. Screen-printed resistive pressure sensors containing graphene nanoplatelets and carbon nanotubes were presented in [30].…”
Section: Introductionmentioning
confidence: 99%
“…Similarly, the piezoresistive property of MWCNTs matrix in PDMS has been exploited to detect static events such as the contact force while holding an object [6]. Our work on pressure sensors based in these materials was presented in ASMC 2014 conference [7]. Extending the research further, we present in this paper the touch or pressure sensors made of P(VDF-TrFE)-MWCNTs composites.…”
Section: Introductionmentioning
confidence: 99%
“…Further, printing of sensors is a low-cost approach. In this regard printed electronics route is appealing and the screen-printing is most attractive alternatives as it is closer to the manufacturing [7,16,17]. The simple processing steps, fast production of sensors, and uniform deposition of materials over large areas make screen-printing an attractive additive manufacturing method [18,19].…”
Section: Introductionmentioning
confidence: 99%