2006
DOI: 10.4028/www.scientific.net/msf.524-525.729
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Scratch Test of TiCN Thin Films with Different Preferred Orientation

Abstract: Abstract. The purpose of this study is to examine the effect of crystallite preferred orientation on the mechanical strength of TiCN thin films in highly compressive residual stress. TiCN thin films were deposited by PVD on JIS-SKH55 (AISI M35) steel. The applied substrate bias voltages were set for -50, -80, -100, -120 and -150V. Subsequently, residual stress and crystalline preferred orientation of these specimens were investigated by X-ray diffraction methodology. The crystalline preferred orientation in th… Show more

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