Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator

Lee, Chengkuo; Lai, Yen-Jyh; Wu, Chia-Yu; Lin, Yu-Shen; Tasi, Ming Hung; Huang, Ruey‐Shing; Ma, Lin

doi:10.1143/jjap.43.3906

Cited by 7 publications

(7 citation statements)

References 6 publications

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“…The device features a vertical plate that was manually assembled on an actuator after the fabrication process. The VOA can achieve 45 dB attenuation and the response time is within 37 ms. A similar structure can be seen from the works by Lee et al [10], but the VOA is driven by scratch drive actuators. Both devices [9,10] need additional post-assembly-processing to make vertical shutters.…”

Section: Introductionmentioning

confidence: 76%

“…In general, MEMS VOAs can be classified into three types: reflective type [2][3][4][5], refractive type [6] and optical shutter type [7][8][9][10]. Reflective MEMS VOAs use a movable micromirror, which is usually actuated by electrostatic force, to reflect the incident light from the input port back into the output port.…”

Section: Introductionmentioning

confidence: 99%

“…Shutter-type MEMS VOAs use the insertion of a movable shutter into the light path to adjust the intensity of the light signal. Numerous shutter-type MEMS VOAs were reported previously in the literatures [7][8][9][10]. Zhang et al [9] has proposed a VOA operated by an electrostatic gap-closing actuator.…”

Section: Introductionmentioning

confidence: 99%

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An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

Hung¹,

Hsieh²,

Su³

2008

J. Micromech. Microeng.

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The design, fabrication and test results of an electromagnetic-actuated micromachined variable optical attenuator (VOA) are reported in this paper. Optical attenuation is achieved by moving a shutter into the light path between a pair of single mode fiber collimators. The shutter, consisting of a 500 µm × 1200 µm vertical micromirror, is monolithically integrated with an actuation flap. The micromirror was made by tetra-methyl ammonium hydroxide (TMAH) anisotropic wet etching with a sharp edge and a smooth reflecting surface. By arranging fiber collimators in different configurations, the reported VOA can be used as either normally-on or normally-off modes due to its relatively large shutter surface. The insertion loss of the VOA is 0.2 dB and 0.4 dB for normally-on and normally-off modes, respectively. Both optical and mechanical simulation models of the device were discussed, and the theoretical calculations based on these models offered an efficient way to predict the performance of the shutter-type VOA. The controllable attenuation range is approximately 40 dB with a driving voltage less than 0.5 V, and the driving power is less than 2 mW. A response time of 5 ms is achieved by applying proper driving waveform.

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Section: Introductionmentioning

confidence: 76%

Section: Introductionmentioning

confidence: 99%

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An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

Hung¹,

Hsieh²,

Su³

2008

J. Micromech. Microeng.

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“…This work, done by Prof. de Rooji's group, really opens a window for new research attempts in MEMS VOAs. Since then, various electrostatic actuation mechanisms have been developed for VOA applications based on surface-micromachined structures [22]- [25] and DRIE-derived structures [26]- [35]. Except to the early work done by Ford and Walker, all these aforementioned research efforts are referring to the so-called planar light attenuation scheme, i.e., the light path is parallel to the substrate surface.…”

Section: Introductionmentioning

confidence: 99%

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

Lee

Hsiao

Kobayashi

et al. 2009

IEEE J. Select. Topics Quantum Electron.

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“…In view of that the surface micromachined shutter and structures are vulnerable to be damaged during optic fiber alignment and assembly process, C. Lee et al proposed a concept and designs for a self-assembled VOA in 2003 [15,16]. As shown in Fig.…”

Section: Surface Micromachined Mechanisms For Voa Applicationmentioning

confidence: 99%

Advances in MEMS Based Planar VOA

Lee

Huang²

2007

JSTS:Journal of Semiconductor Technology and Science

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MEMS technology is proven to be an enabling technology to realize many components for optical networking applications. Due to its widespread applications, VOA has been one of the most attractive MEMS based key devices in optical communication market. Micromachined shutters and refractive mirrors on top of silicon substrate or on the device layer of SOI (Silicon-on-insulator) substrate are the approaches trapped tremendous research activities, because such approaches enable easier alignment and assembly works. These groups of devices are known as the planar VOAs, or two-dimensional (2-D) VOAs. In this review article, we conduct the comprehensively literature survey with respect to MEMS based planar VOA devices. Apparently MEMS VOA technology is still evolving into a mature technology. MEMS VOA technology is not only the cornerstone to support the future optical communication technology, but the best example for understanding the evolution of optical MEMS technology.

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Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator

Cited by 7 publications

References 6 publications

An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

Advances in MEMS Based Planar VOA

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