Scattering of Roughened TCO Films – Modeling and Measurement

Schröder, Sven; Duparré, Angela; Füchsel, Kevin; Kaiser, Norbert; Tünnermann, Andreas; Harvey, James E.

doi:10.1364/oic.2010.thd3

Cited by 4 publications

(4 citation statements)

References 4 publications

(4 reference statements)

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“…The extra cos θ s that appears in the obliquity function for scattered intensity in Eqs. (54) and (55) obscures some substantial differences that become apparent when we compare BRDF profiles predicted by the different theories. Figure 16 shows a direct comparison of the BRDF predictions by the classical Rayleigh-Rice theory given by Eq.…”

Section: A Comparison With the Rayleigh-rice Theorymentioning

confidence: 99%

“…This general expression for the surface transfer function may be used to model either reflective or transmissive scatter, the latter being of interest, for example, in calculating the increased efficiency of thin-film photovoltaic silicon solar cells by utilizing enhanced roughness on the TCO-Si interface [52][53][54]. However, the discussion in this paper will be restricted to applications of scattering from mirror surfaces, i.e., n 2 ¼ −n 1 .…”

Section: Generalized Harvey-shack Surface Scatter Theorymentioning

confidence: 99%

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Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles

2011

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Scattering effects from microtopographic surface roughness are merely nonparaxial diffraction phenomena resulting from random phase variations in the reflected or transmitted wavefront. Rayleigh-Rice, Beckmann-Kirchhoff. or Harvey-Shack surface scatter theories are commonly used to predict surface scatter effects. Smooth-surface and/or paraxial approximations have severely limited the range of applicability of each of the above theoretical treatments. A recent linear systems formulation of nonparaxial scalar diffraction theory applied to surface scatter phenomena resulted first in an empirically modified Beckmann-Kirchhoff surface scatter model, then a generalized Harvey-Shack theory that produces accurate results for rougher surfaces than the Rayleigh-Rice theory and for larger incident and scattered angles than the classical Beckmann-Kirchhoff and the original Harvey-Shack theories. These new developments simplify the analysis and understanding of nonintuitive scattering behavior from rough surfaces illuminated at arbitrary incident angles.

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Section: A Comparison With the Rayleigh-rice Theorymentioning

confidence: 99%

Section: Generalized Harvey-shack Surface Scatter Theorymentioning

confidence: 99%

Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles

2011

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“…For optical imaging surfaces light scattering is usually an unwanted effect caused by surface imperfections and fabrication errors [1][2][3]. Although several optical applications make use of rough interfaces to tailor the light distribution, such as optical diffusors or structured thin film solar cells [4,5]. For many of these applications predicting the light scattering properties from surface roughness metrology data is desirable.…”

Section: Introductionmentioning

confidence: 99%

Modeling of light scattering in different regimes of surface roughness

Schröder¹,

Duparré²,

Coriand³

et al. 2011

Opt. Express

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144

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The light scattering of rough metallic surfaces with roughness levels ranging from a few to several hundred nanometers is modeled and compared to experimental data. Different modeling approaches such as the classical Rayleigh-Rice vector perturbation theory and the new Generalized Harvey-Shack theory are used and critically assessed with respect to ranges of validity, accuracy, and practicability. Based on theoretical calculations and comparisons with Rigorous Coupled Wave Analysis for sinusoidal phase gratings, it is demonstrated that the approximate scatter models yield surprisingly accurate results and at the same time provide insight into light scattering phenomena. For stochastically rough metal surfaces, the predicted angles resolved scattering is compared to experimental results at 325 nm, 532 nm, and 1064 nm. In addition, the possibilities of retrieving roughness information from measured scattering data for different roughness regimes are discussed.

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“…[19][20][21] The necessary transmissive conductive oxide (TCO) layer is deposited onto a glass substrate. The enhanced roughness interface between the TCO and silicon might be produced by acid-etching the TCO surface before depositing a thin-film (~ 600nm) layer of silicon.…”

Section: Enhanced Roughness For Increasing the Efficiency Of Thin-filmentioning

confidence: 99%

Scattering from moderately rough interfaces between two arbitrary media

2010

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The generalized Harvey-Shack (GHS) surface scatter theory has been shown to accurately predict the BRDF produced by moderately rough mirror surfaces from surface metrology data. The predicted BRDF also holds for both large incident and scattering angles. Furthermore, it provides good agreement with the classical Rayleigh-Rice theory for those surfaces that satisfy the smooth-surface criterion. The two-dimensional band-limited portion of the surface PSD contributing to scattered radiation is discussed and illustrated for arbitrary incident angles, and the corresponding relevant roughness necessary to calculate the total integrated scatter (TIS) is determined. It is shown that BRDF data measured with a large incident angle can be used to expand the range of surface roughness for which the inverse scattering problem can be solved; i.e., for which the surface PSD can be calculated from measured BRDF data. This PSD and the GHS surface scatter theory can then be used to calcu late the BRDF of that surface for arbitrary incident angles and wavelengths that do not satisfy the smooth-surface criterion. Finally, the surface transfer function characterizing both the BTDF and the BRDF of a moderately rough interface separating two media of arbitrary refractive index is derived in preparation for modeling the scattering of structured thin film solar cells

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Scattering of Roughened TCO Films – Modeling and Measurement

Cited by 4 publications

References 4 publications

Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles

Linear systems formulation of scattering theory for rough surfaces with arbitrary incident and scattering angles

Modeling of light scattering in different regimes of surface roughness

Scattering from moderately rough interfaces between two arbitrary media

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