1999
DOI: 10.1007/s100510050760
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Scanning X-ray interferometry and the silicon lattice parameter: towards relative uncertainty?

Abstract: In order to reduce measurement uncertainty of the (220) lattice spacing of silicon to a few parts per 10 9 , a combined X-ray and optical interferometer capable of millimeter scans is being tested. A new series of measurements confirmed the value obtained with our previous set-up, and the bounds of measurement uncertainty were investigated. The article supplements the analysis of the error budget and provides a safer footing for the monocrystalline silicon lattice parameter value.

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Cited by 33 publications
(20 citation statements)
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“…Typically, the GGA tends to overestimate the equilibrium volume whereas the LDA tends to underestimate it. For the cd phase of Si the experimental equilibrium volume at room temperature is 1,40,41,42,43 40.05 Å3 , which lies between the LDA and GGA ones, with a deviation of about 2%. The experimental value for cd Ge is 37,42,44,45 between 45.00 and 45.31 Å3 , with a deviation from our result of less than 6%.…”
Section: Structural Relaxation and Equilibrium Propertiesmentioning
confidence: 86%
“…Typically, the GGA tends to overestimate the equilibrium volume whereas the LDA tends to underestimate it. For the cd phase of Si the experimental equilibrium volume at room temperature is 1,40,41,42,43 40.05 Å3 , which lies between the LDA and GGA ones, with a deviation of about 2%. The experimental value for cd Ge is 37,42,44,45 between 45.00 and 45.31 Å3 , with a deviation from our result of less than 6%.…”
Section: Structural Relaxation and Equilibrium Propertiesmentioning
confidence: 86%
“…is the thermal expansion coefficient of silicon, equal to 2.58 × 10 -6 K -1 at ambient temperature [10].…”
Section: Experimental Techniquesmentioning
confidence: 99%
“…Conversion from the temperature scale to the energy scale is accomplished by the relation ⌬E/E ϭ␣(T)⌬T, where ␣ is the thermal-expansion coefficient of silicon. 17 The sample had a cylindrical shape with a diameter of 4 mm and a height of 2 mm. It was oriented with the (1,1 ,0) cylindrical axis perpendicular to the scattering plane, thus allowing to access the three principal reciprocal-lattice directions by a simple rotation of the sample around its cylindrical axis.…”
mentioning
confidence: 99%