1993
DOI: 10.1080/00018739300101474
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Scanning tunnelling microscopy of the interaction of hydrogen with silicon surfaces

Abstract: This article focuses on recent scanning tunnelling microscopy studies that have led to an improved understanding of the interaction of hydrogen with silicon surfaces. The structure and bonding of the Si(111)-7 x 7 and Si(100)-2 x 1 surfaces are described together with the adsorption and desorption of hydrogen from these surfaces. The role of hydrogen in the passivation of silicon surfaces and silicon chemical vapour deposition are also discussed.

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Cited by 294 publications
(175 citation statements)
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“…Boland 22 even claimed that there was no such minimum and that its previous observation was a "tip artifact". Our results do not support this interpretation.…”
mentioning
confidence: 99%
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“…Boland 22 even claimed that there was no such minimum and that its previous observation was a "tip artifact". Our results do not support this interpretation.…”
mentioning
confidence: 99%
“…Boland 22 argued that STM images of the monohydride structure could not show a splitting at bias voltages between -1 and -3 V, because the Si-H bonding states at 4.7 eV33 below EF are not accessible, and tunneling can therefore only occur through bulk valence band states. However, we believe that existing electronic structure calculations may not properly take into account all the rehybridizations which occur upon H adsorption.…”
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confidence: 99%
“…16,28 However, the bright ball-like features most probably correspond to missing H atoms. 29,30 Fig. 1 also shows the RA spectrum after annealing the initially monohydride terminated surface under N 2 at 573 K and cooling to RT (thick black line).…”
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confidence: 99%
“…The interaction of hydrogen with silicon surfaces is a subject of intensive research [1][2][3]. In particular, the question of the mechanism for the recombinative desorption of H 2 has been widely debated [3].…”
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confidence: 99%